VQ4000

R1 port A, B port D side U side P port Port R2 0 A Without SI unit With general type SI unit (Series EX300) Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System Electrical entry D side U side IP65 compatible B Cable length 0.6 m Cable length 1.5 m Cable length 3 m U0 U1 U2 D0 D1 D2 Note) Shown VV5Q41-05C12FD0 Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2 power

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 available Without cable Cable length 1.5m Cable length 3m Cable length 5m U0 U1 U2 U3 U side D0 D1 D2 D3 D side 2 to 12 stations 2 to 12 stations Cable length 0.6m Cable length 1.5m Cable length 3m U0 U1 U2 D0 D1 D2 Kit F Kit F Kit L Kit L Type of connection T1 S Kit (Individual terminal

VQ5000

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Size: Small Flow Style, Control Valve: Metering Valve, Combination Valve: Stop Valve, Voltage: 100VAC, Electrical Entry: DIN Terminal, Suffix: Convertor Unit/for CC63 (To be Integrated in CCT63)

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 1 (Stop Valve/Skip Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 3 (Skip Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: D (DIN Terminal), Suffix: U1 (Convertor Unit/for CC63 (To be Integrated in CCT63))

Types: Guide, Maintenance part name: Guide pin assembly, Bore size(ø): -, Compatible air cylinder details: -, Port types: Round/No shim, Applicable hole diameter(ø): 18, Stamped number: 178, Stroke(mm): -, Surface Treatment: -

Types: Guide, Maintenance part name: Guide pin assembly, Bore size(ø): -, Compatible air cylinder details: -, Port types: Round/No shim, Applicable hole diameter(ø): 20, Stamped number: 199, Stroke(mm): -, Surface Treatment: -

1

Applicable bore size A1 L1 MM NDH10 NX R1 U1 Part no.

High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. !

5

REC A1 U1 LB A NX Z (MIN) A1 U1 LB A Smooth Smooth (mm) (mm) Part no.

Smooth Cylinder/Low Speed Cylinder

RR1 NDH10 MM NDH10 MM 45 RR1 MM NDH10 E1 NX1 H A NX E1 R2 U1 A1 U1 L1 A NX Z (Min.) A1 U1 L1 A (mm) (mm) A A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 Applicable bore size (mm) 20 25, 32 40 Bore size 20 25, 32 40 Part no.

Table of Contents

MM L RR1 RR1 E1 E1 A L1 U1 A1 NX A1 L1 U1 NZ NX A Part no. Applicable bore size (mm) E1 Part no. Applicable bore size (mm) E1 Applicable pin no.

CATALOG

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

Brake mechanism added

I Type Single Knuckle Joint Rod End Nut (Standard) 30 30 d d NDH10 NDH10 MM MM RR1 RR1 45 45 30 D D d E1 E1 C C NDH10 MM L1 A1 U1 L1 A1 U1 RR1 45 30 d H NX B H NX B NDH10 A A D E1 C MM RR1 45 Material: Free cutting sulfur steel (mm) Material: Rolled steel (mm) L1 A1 U1 D Part no. Applicable bore size A A1 E1 L1 MM R1 U1 NDH10 NX Part no.

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)