Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

XL

XL -50 XL -63 XL -80 (a) 1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

8 Product image For PROFIBUS DP (Plug, B-coded) Socket Plug Plug Socket Number of functional poles M12: 2 pins M12: 3 pins M12: 4 pins Key type B-coded (Reverse key) 3 4 4 3 5 1: VP 4: B Line 5 1: 2: A Line (Green) 3: 4: B Line (Red) 5: 390 1 2 2 1 Pin assignment 220 2: A Line 3: DGND Plug, B-coded Plug, B-coded (Viewed from the plug/socket side) 390 Fixed cable length 5 m Cable O.D

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

CY1

(except for 50 and 63) b C CY1B6 -SCY1B, #1 CY1B10 -SCY1B, #2 CY1B15 -SCY1B, #3 CY1B20 -SCY1B20, #1 CY1B25 -SCY1B, #4 CY1B32 -SCY1B, #5 CY1B40 -SCY1B, #6 CY1B50 -SCY1B, #7 CY1B63 -SCY1B, #8 H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Series KP/KPQ/KPG

Operating temperature 20 to 80C (-40 to 176F), For water 5 to 80C (41 to 176F) Material Polyolefin resin 1in = 25.4mm Note 1) Consult SMC regarding other fluids. Note 2) The maximum operating pressure is the value at 20C (68F). Refer to the burst pressure characteristics curve for other temperatures.

Series KP/KPQ/KPG

Operating temperature 20 to 80C (-40 to 176F), For water 5 to 80C (41 to 176F) Material Polyolefin resin 1in = 25.4mm Note 1) Consult SMC regarding other fluids. Note 2) The maximum operating pressure is the value at 20C (68F). Refer to the burst pressure characteristics curve for other temperatures.

KP/KPQ/KPG

pressure (at 20C) 0.7MPa Note 2) Min. bending radius mm 10 20 25 30 40 Burst pressure Refer to the burst pressure characteristics curve. 20 to 80C, For water 5 to 80C Operating temperature Material Polyolefin resin Note 1) Consult SMC regarding other fluids.

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

T

(mm) Model Clean series M B Black 8 10 5 6.5 12 8 2.5 6 4 4 Tubing I.D.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Bernoulli Gripper

Attached O-ring Model Size ZNC20m 5.8 x 3.8 x 1 Side ported B-B Air supply port PC B Air supply port PA O-ring O-ring Multi-port Plug B Air supply port PB Requires no piping (Body ported) Side ported If the steel ball is not visible the multi-port is on the left and the air supply port PB is on the right, the air supply port PA is plugged.

FQ1

Micromesh element (SUS304) Bonding material: Epoxy resin Q005 FQ1 0 1 1 B 06 N Part number Dimensions Filtration accuracy (m) Element symbol Element type Select from tables on the right.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Recommended flow rate Absolute filtration accuracy (m) Recommended flow rate (l/min) 2 4 20 6 13 Operating temperature: 0 to 80C Differential pressure resistance: 0.5MPa 8

Clean Gas Filter

MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection

Series TPH Clean Tubing Polyolefin Tubing

Burst pressure 20 to 80C, for water 5 to 80C (No freezing) Operating temperature Polyolefin resin Material Class 3 Cleanliness class (ISO class) Note 1) Please consult with SMC regarding other fluids. Note 2) The maximum operating pressure is the value at 20C. Refer to the burst pressure characteristics curve for other temperatures.

CATALOG

L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000