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Magnetically Coupled Rodless Cylinder

Mass A = 27 100 X-axis Y-axis Z-axis mn Wn xn yn zn 25 Wa Wb Wc Wd 1.0 kg 0 mm 0 mm 5 mm 50 5 O Y 1.0 kg 0 mm 0 mm 50 mm 50 0.5 kg 0 mm 25 mm 100 mm 3.0 kg 0 mm 50 mm 100 mm n = a, b, c, d (1 Kg = 2.2 lbs) Z X [3] Calculation for Overall Center of Gravity mt = 3mn = 1.0 + 1.0 + 0.5 + 3.0 = 5.5 kg = 0 mm X (The center of gravity in the x direction of all work pieces is 0, so X = 0 mm.)

1

126 138 73.5 82 94 106 112 136 154 166 100 st 125 st 100 st 125 st INDEX 390 Series CJ2 Single Acting, Spring Return: Double Clevis (D) CJ2D Bore size Stroke SZ CDH9+0.030 0 Piping port M5 x 0.8 GB NB Clevis pin (cdd90.030 0.060) MM Rod end nut C C D CZ 0 0.3 B 0 0.3 ZZ + Stroke Z + Stroke S + Stroke H A NA CX+0.2 +0.1 B 0 0.3 U CZ 0 0.3 R (mm) Bore size A B C CD (cd) CX CZ D GB H MM NA

Table of Contents

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

Free Mount Cylinder

(g) JIS Symbol Double acting, Spring rod Stroke (mm) Model 40 50 60 70 80 90 100 43 (53) 49 (59) 50 (65) C(D)U6-D 64 (74) 72 (82) 80 (90) C(D)U10-D 92 (122) 104 (134) 116 (146) C(D)U16-D 216 (253) 238 (275) 260 (297) 282 (319) 304 (341) C(D)U20-D Made to Order Specifications (For details, refer to P.43.) 363 (422) 397 (456) 431 (490) 465 (524) 499 (558) C(D)U25-D Symbol Specifications

NCG/CG1

A MM A1 E1 L1 NX NDH10 Type C 12 for axis 0.050 0.093 Type C 14 for axis 0.050 0.093 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 25 30 30 40 50 55 M8 x 1.25 34 41 42 56 71 79 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 18 22 28 32 8 10 10 14 18 22 +0.058 0 0.2 0.4 Type C 16 for axis 0.050 0.093 M10 x 1.25 +0.058 0 0.2 0.4 Type C

MHZ

100 150 Misc.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Rotary Gripper Series MRHQ

"#$ " %# &'# D t D D t t c c e c e e u u u s s s d d d i i i Rotary Gripper g g g o o o n n n r r r P P P A A A 9 9 9 MRHQ 10/16/20/25 w w w 9 9 m 9 I m I 1 1 n 9 9 9 9 n 9 9 d u d u r u a a a r u 9 o 9 9 s o s F tr F ie tr ie r r r 1 1 1 Modular construction D r D r d d d e e e e v v s s o o i i n g n g n n n n a a H H n P n P g g r r Gripper section is unitized for simple replacement.