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Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

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Table of Contents

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High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

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Magnet: D (Built-in Magnet), Mounting: L (Axial Foot), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 500mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen.

Magnet: Built-in Magnet, Mounting: Axial Foot, Type: Rubber Bumper, Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 500mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen.

NCQ8

L M9NL 197in (5 m) .

XM, XY

-M9NL Du Seal material and its changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

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