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Magnet: D (Built-in), Mounting: D (Clevis), Bore Size: 40mm, Stroke: 75mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Magnet: Built-in, Mounting: Clevis, Bore Size: 40mm, Stroke: 75mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: Built-in, Mounting: Clevis, Bore Size: 40mm, Stroke: 75mm, Rod End Thread: Male Thread, Auto Switch: A96--Reed, DC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

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0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Table of Contents

Standard stroke (mm) Bore size (mm) PW Q R B C DA G GA GB H J K L MM ML NN PB 20 25 18 70 78 62 10 36 10.5 8.5 83 18 18 24 M5 x 0.8 13 M5 x 0.8 10.5 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 25 28.5 26 78 78.5 62.5 12 42 11.5 9 93 21 21 30 M6 x 1.0 15 M6 x 1.0 13.5 U VA VB WA WB X Bore size (mm) XA XB S T 75 st or less Over 250 st Over 75 st to 175 st Over 175 st to 250 st 75

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Table of Contents

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

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Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

Made to Order

(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Table of Contents

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.