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Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: M9B, Lead Wire

Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 10mm, Stroke: 15mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9B--Solid State, Gen.

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: M9B, Lead Wire

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Table of Contents

Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Aluminum High Vacuum Angle Valve

(NW) Right flange surface Left flange surface D K (DN) E H V I G L H A V V M A C U U Flange side r Temperature specifications/Heater t Auto switch type Symbol Nil Auto switch model Without auto switch (without built-in magnet) Remarks Symbol Nil Temperature 5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(

1

Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

How to Order M9N A 25 XMD XYD Angle type M9N A 25 In-line type 1 2 3 4 5 6 7 2. Flange type 1. Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

15

Note 5) Each value is a guide. Use such value to select a motor capacity.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

MY1

A, L and H.

2

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve Note 5) Note 6) AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch Note 6) IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer Note 5) Note 6) Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02

5

Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,

Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 10mm, Stroke: 15mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !