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3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

Model Opening/ Closing stroke (Both sides) (mm) Gripping force (1) Bore size (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model External Internal MHZ2-6D MHZ2-10D (N) MHZ2-16D (N) MHZ2-20D (N) MHZ2-25D (N) MHZ2-32D MHZ2-40D MHZ2-6S MHZ2-10S (N) MHZ2-16S (N) MHZ2-20S (N) MHZ2-25S (N) MHZ2-32S MHZ2-40S MHZ2-6C MHZ2-10C (N) MHZ2-16C (N) MHZ2-20C (N) MHZ2-25C (N) MHZ2

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

NCQ8

switch Built-in magnet Number of auto switches Mounting Through-hole Both end tapped Rear clevis Front screw clearance hole Rear screw clearance hole Through screw clearance hole B A C E M N Nil S n 2 pcs. 1 pc. n pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

B Number of auto switches Mounting style Nil S n 2 pcs. 1 pc. n pcs.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A B A B A B C D Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

Table of Contents

Solid state switch D-F8 CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (Without magnet) Series Variations Bore size (mm) A(a) B(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

XM, XY

G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87 114 Fn 95 110 Fd 114 Fc 52 70 83 G 77 76.5 105 H