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Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

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x 2.0 31 M14 x 2.0 12.5 20 67.5 WB Bore size (mm) YY X YL Z 50 st or less Over 250 st Over 50 st to 150 st Over 150 st to 250 st 80 100 24 28 M12 x 1.75 54 92 128 178 100 124 28 11 M14 x 2.0 47 85 121 171 MGPM (Slide bearing) A, DB, E Dimensions End Lock Mechanism Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A DB E A E Bore size (mm) Bore size (mm) Bore size (mm) DB DL DM HR

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

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M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

NCQ8

CE CD CJ0.005 CM CF CC CK0.015 Front screw clearance hole / NC(D)Q8E(Z)S T (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E B 4-E 0.34 0.20 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Rear screw clearance hole / NC(D)Q8M(Z)S T (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E B 4-E 4-E 0.34 0.20

Air Cylinder

10.5 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 122 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 154 With Rod Boot (mm) B3 e f h l ZZ Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201

Smooth Cylinder/Low Speed Cylinder

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder.

Made to Order

) 150 (150) 130 (150) 12 53 (63) 63 (63) Note 1) ( ): Denotes the dimensions with auto switch.

Electric Actuator/Slider Type

B D x 150 (= E) 15 15 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of R chamfering.

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c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Air Cylinder

Technical Data 299 CG1 Series Basic: CG1BN With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke h + l ZZ + l + Stroke h + l 20 to 63 80, 100 With Rod Boot (mm) Bore size e f h IJ JH (Reference) JW (Reference) l ZZ 20 30 18 55 27 15.5 10.5 126 (134) 25 30 19 62 32 16.5 10.5 133 (141) 32 35 19 62 38 18.5 10.5 135 (143) 40 35 19 70 48 21.5 10.5 150 (159) 50 40 19 78 59 24 10.5 170 (182

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

(= E) 15 60 6H9 ( ) depth 6 +0.030 0 Motor mounting position: Left side parallel LEFS40LV Motor mounting position: Right side parallel LEFS40RV 150 n x 6.6 Encoder cable (7) Encoder cable (7) 153 153 7 76 60 64 60 64 Motor cable (7) Motor cable (7) Dimensions [mm] Model L A B n D E LEFS40lll-150l 403.4 156 328 4 150 LEFS40lll-200l 453.4 206 378 6 2 300 LEFS40lll-250l 503.4 256 428 6 2 300

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

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B D x 150 (= E) 60 15 Note) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.