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q w e SY No.

High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.

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1 e !

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100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

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43 49 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Over 200 st Over 50 st to 200 st Over 50 st to 200 st Bore size (mm) Bore size (mm) Over 200 st Over 30 st to 100 st Over 30 st to 100 st Over 200 st Over 100 st to 200 st Over 100 st to 200 st 50 st or less 50 st or less Over 200 st 30 st or less 30 st or less 104 104.5 51 51 20

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

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J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200,

Air Cylinder

10.5 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 122 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 154 With Rod Boot (mm) B3 e f h l ZZ Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

Smooth Cylinder/Low Speed Cylinder

-X 1233 Series CS2Y Dimensions Rod flange: CS2YF Port With rod boot V W G G 4 x J Cushion valve Width across flats KA 2 x P (Rc, NPT, G) 4 x FD MM FY D E E e B H K A AL ZZ1 + l + Stroke h + l l f FT B C N N F FZ FX ZZ + Stroke M S + Stroke (mm) Bore size (mm) Stroke range (mm) B C A AL B D E F FD FT FX FY FZ G J V 125 140 160 50 47 143 145 115 32 71 43 19 14 190 100 230 15 M14 x 1.5 15 Up

NCQ8

CE CD CJ0.005 CM CF CC CK0.015 Front screw clearance hole / NC(D)Q8E(Z)S T (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E B 4-E 0.34 0.20 0.34 0.25 0.50 0.25 0.50 0.34 0.53 0.34 0.66 0.41 B Rear screw clearance hole / NC(D)Q8M(Z)S T (Inch) Symbol Bore 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") E B 4-E 4-E 0.34 0.20

Made to Order

Over 200 st Over 30 st to 100 st 69 75.5 86 91.5 E 30 st or less Over 200 st Over 30 st to 100 st 6 12 23 28 Bore size (mm) HT Over 100 st to 200 st 110 110.5 127.5 127.5 Over 100 st to 200 st 47 47 64.5 64 80 93 20 25 E 50 st or less Over 200 st Over 50 st to 100 st Over 100 st to 200 st A 50 st or less Over 200 st Over 50 st to 100 st 89.5 89.5 101.5 101.5 Bore size (mm) HT Over 100 st

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

E C x 200 (= D) 25 Note 1) Distance within which the table can move when it returns to origin.

Air Cylinder

CG1GN E 0 0.05 FX0.15 B ZZ + Stroke H FT F B FX0.15 (mm) (mm) Rod Flange Bore size ZZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st 20 131 156 181 25 136 161 186 211 32 138 163 188 213 40 155 180 205 230 Bore size Stroke range B E F FX FD FT H 20 Up to 125 40 12 2 28 5.5 6 35 25 Up to 200 44 14 2 32 5.5 7 40 32 Up to 200 53 18 2 38 6.6 7 40 40 Up to 200 61 25 2 46 6.6 8 50 * End boss

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E C x 200 (= D) 20 Note) When mounting the actuator using the body mounting reference plane, use a pin.

Integrated Controller

Weight [g] JX-CDS-E-1-S 68 JX-CDS-E-3-S 125 JX-CDS-E-5-S 200 JX-CDS-E-10-S 387 JX-CDA-E-1-S 68 JX-CDA-E-3-S 125 JX-CDA-E-5-S 200 JX-CDA-E-10-S 387 Connector type: Right angled (35) L 35 5 B end A end Connector type: the right angled type cannot be used for the parallel mounting type. (15) PIN 2 PIN 3 45 PIN 4 PIN 1 62 Slider Type Rod Type EQFSH/EQYH Series Battery-less Absolute Encoder

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c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).