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VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

P. 34 P. 34 KQ2L T KQ2T P. 34 KQ2H Use to branch line from female thread in both 90 directions. VMG Branch Y Male run tee Gasket Use to branch line in the same direction from female thread and in 90 direction. KQ2U KQG P. 35 P. 35 KQ2Y P. 36 Use to branch line in the same direction from female thread.

P. 34 P. 34 KQ2L T KQ2T P. 34 KQ2H Use to branch line from female thread in both 90 directions. VMG Branch Y Male run tee Gasket Use to branch line in the same direction from female thread and in 90 direction. KQ2U KQG P. 35 P. 35 KQ2Y P. 36 Use to branch line in the same direction from female thread.

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

$0Pi8$ I)(P _ uomlam neouil nctun loxt Fifl.[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KKH3S-50N -60N -65N KKH4S-50N -60N -65N -80N -85N 1/8 1/8 1/4 1/4 Use Series KK plug with Series KKH socket, as there is no plug available in Series KKH.

MHM-16D MHM-25D MHM-32D MHM-50D M5x0.8 Rc1/8 2mm 0.20.6MPa >2mm 0.20.6MPa 0.350.6MPa 0.9MPa -1060 :2mm 50N 160N 250N 400N :6mm 50N 200N 500N 1000N 0.3N 2 2-1. () ()() () / -5- 2-2. -6- 1. (Nm) L(mm) MHM-16D M3x0.5 0.63 5 MHM-25D M4x0.7 1.5 7 MHM-32D M5x0.8 3 8 MHM-50D M6x1 5.2 9 2.

Real-time switch output Hysteresis mode Unit switching ON YES OFF P-1 P-2 For Air Instantaneous flow rate Display Instantaneous flow rate Accumulated flow "P" Window comparator mode H : Hysteresis L/min L CFM x 10-2, CFM x 10-1 ft3 x 10-1 H H ON CFM = ft3/min NO OFF P-1 P-2 High Flow Rate Type (For Air) Instantaneous flow rate OUT1 Output mode Display Instantaneous flow rate Accumulated

= 8.2 29 8.2 x 7 = 57.4 P = 8.2 4 3 105 15 *5 5 6 7 8 7.5 4.5 25H8 (10) 5.5 (10) 30H8 45 45 1 2 3 1 12 P=45 8 P=30 2 11 4 7 10 3 22.5 5 6 6 7 8 9 4 5 4-M3 x 0.5 thread length 8 P.C.D.48 51 46 2-M4 x 0.7 thread length 8 P.C.D.43 Mounting Brackets/Flanges MQR2-F MQR4-F 2-8 counter bore depth 3 2-4.2 through P.C.D.38 4-3.5 drill through 17 drill through 4-3.5 through 22 drill through 2-3.2 through

ZS-26-E (4 pcs. per set) Connector 3 Multi-channel Controller Series PSE200 Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage 55mA or less (Current consumption for sensor is not included.)

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V