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High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

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0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

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M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

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Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

Smooth Cylinder/Low Speed Cylinder

(mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N P Q S O A B B 36 46 43.5 53.5 53 63 A 44 54 53.5 63.5 65 75 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 54 46 15 20 77 10.5 103 7 17 8 60 9 14 depth 10.5 1/4 15 93 M10 x 1.5 80 63.5 53.5 21 25 98 12.5 132 6 22 10 77 112.5 11 17.5 depth 13.5 3/8 16 M16 x 2.0 100 75 63 27 30 117 13 156

Air Cylinder

, 100, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Made to Order

W View A-A' Standard Stroke (mm) Bore size (mm) 20 25 32 40 AB AP Stroke range (mm) A AA AC AD AE AF B C D E F G GC GK GL GQ GR H I J K 75, 100, 125, 150, 200 94 11 13 16.5 70 35 32 135 26.5 50 118 6.8 27 5.5 6 8 4 35 60 80 M6 x 1 depth 12 11 depth 8 M8 x 1.25 depth 14 M8 x 1.25 depth 16 14 depth 10 M10 x 1.5 depth 18 104 14 16 19 75 40 37 160 31.5 50 140 8.6 34 6.5 9 10 7 40 70 95 75, 100

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Without rod boot With rod boot H Z ZZ e f h l Z1 ZZ1 125 15 27 65 M30 x 1.5 30.5 1/2 98 35 29 110 273 302 75 40 133 1/5 Stroke 296 325 140 15 27 75 M30 x 1.5 30.5 1/2 98 40 32 110 283 315 75 40 133 1/5 Stroke 306 338 D160 17 34 80 M36 x 1.5 34.5 3/4 106 45 36 120 306 342 75 40 141 1/5 Stroke 327 363 * The minimum stroke with rod boot is 30 mm or more. ** For auto switch mounting position

Free Mount Cylinder

65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series Compliant with clean environment Specifications 10-CDU (Relief type) 11-CDU

Electric Actuator/Slider Type

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Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E F H I J K M N Q S L P O B A 44 54 53.5 63.5 65 75 B 36 46 43.5 53.5 53 63 A 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 46 15 20 77 10.5 54 M10 x 1.5 14 depth 10.5 93 103 7 17 60 9 15 8 Rc 1/4 80 53.5 21 25 98 12.5 63.5 M16 x 2.0 17.5 depth 13.5 112.5 132 6 22 77 11 16 10 Rc 3/8 100 63 27 30 117 13 75 M20

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

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Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 40 50 60 70 80 0 10 20 30 40 50 Work load [kg] Work load [kg] These graphs are examples of when the standard motor is mounted.

Air Cylinder

st or more 10 st or more 15 to 74 st 75 st or more D-B59W 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion type is not available for 80 and 100.