Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

NCG/CG1

A MM A1 E1 L1 NX NDH10 Type C 12 for axis 0.050 0.093 Type C 14 for axis 0.050 0.093 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 25 30 30 40 50 55 M8 x 1.25 34 41 42 56 71 79 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 18 22 28 32 8 10 10 14 18 22 +0.058 0 0.2 0.4 Type C 16 for axis 0.050 0.093 M10 x 1.25 +0.058 0 0.2 0.4 Type C

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

XM, XY

D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

NCQ8

L M9NL 197in (5 m) .

Table of Contents

1.15 24 7 11 4 22 40 38.4 29 4 70.5 56 40 0.050 0.093 IY-G04SUS 50, 63 40 CG-E050SUS 10 14 Type C 10 for axis 9.6 41.6 36.2 1.55 1.15 40 12 15 5 25 50 59.6 35 6 106.5 84 50 0.065 0.117 IY-G05SUS 80, 100 50, 63 CG-E080SUS 14 22 Type C 14 for axis 13.4 50.6 44.2 2.05 1.15 60 14 23 6 40 80 87.2 57 9 144.5 120 80 IY-G08SUS 80 18 Type C 18 for axis 17 64 56.2 2.55 1.35 IY-G10SUS 100 22 Type C

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

auto switch : MHR2-30R 76 73 B MHR2-30E Port Location 3 x M5 x 0.8 thread depth 10 P.C.D.43 (Mounting thread) 80 120 15.5 120 A C 54 M5 x 0.8 M5 x 0.8 Finger closing port Finger opening port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6 x M5 x 0.8 thread depth 10 (A, B, C common view) 50 +0.02 0 (A, B, C common view) 3 x 5 depth 10 16h9 0 0.043 2 10 38.5 22 (76) 70

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

Rotary Gripper Series MRHQ

50 Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 30 0.3MPa 0.3MPa 0.3MPa 0.6MPa, 0.7MPa 30 0.4MPa 0.4MPa 0.4MPa 0.3MPa 0.5MPa 0.5MPa 0.5MPa 20 0.4MPa 0.5MPa 20 0.6MPa 0.6MPa 0.6MPa 10 10 H H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

Magnetically Coupled Rodless Cylinder

CAT.ES20-172 C Magnetically Coupled Rodless Cylinder New Upgraded version of space saving magnetically coupled rodless cylinder 6, 10, 50, and 63 have been added.

CE

bore size (mm) D C d H B C D Part no.

CE

bore size (mm) D C d H B C D Part no.