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Table of Contents

D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style .

High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

Aluminum High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

MHZ

D-Y7P D-Y69 D-Y7PV D-Y7W D-M9V D-F9WV D-Y7WV D-M9 D-F9BAL D-F9W Model MHS 4 8 1 6.5 3 1.5 Open Closed Open Closed Open Closed Open Closed MHZJ2-10 With dust cover No setting No setting MHC MHZJ2-16 No setting No setting MHT MHZJ2-20 MHY MHZJ2-25 MHW Note) There is no auto switch protrusion from the body's end surface.

MHZ

Standard Body Lead wire type In-line electrical entry type Perpendicular electrial entry type Explanatory drawing Auto switch L L L Finger position D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-M9V D-F9WV D-Y7WV D-M9 D-F9BAL D-F9W Model 11 13 9 11 Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed

Free Mount Cylinder

, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

NCQ8

NCDQ8A(B)-(C)(M) (in) NCDQ8A(B)-100T(M) (025st to 100st) (in) D-A9, D-A9V Bore size D-M9(V), D-F9W(V) D-A9, D-A9V D-M9(V), D-F9W(V) D-F9BAL D-F9BAL Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 056 075 106 150 200 250 0.61 0.55 0.85 0.83 0.81 0.98 0.04 0.08 0.12 0.12 0.2 0.28 0.71 0.81 0.96 1.18 1.45 1.6 0.77 0.71 1 0.98 0.96 1.14 0.2 0.24 0.28 0.28 0.35 0.43

XM, XY

(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Table of Contents

Bore size (mm) Stroke (mm) Bore size (mm) Manufacturable stroke range Applicable auto switch Note D25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-F7V D-F7/J79 D-J79C D-F7WV D-F7W/J79W D-F7BAL/F7BAVL D-F79F/F7NTL Switch mounting screw (M3 x 0.5 x 8l ) Square nut 12 20 -X BQ-1 20 25 to 300 32 2025 to 400 40 25 to 600 32 40 50 63 Switch

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Electrical entry (Fetching direction) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) (mm) Type Model Features Grommet (In-line) D-A90 Stroke (mm) 20 41 29 47 35 Without indicator light Stroke (mm) 10

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Table of Contents

D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. 2-color Indication Type . D-A79W Rail Mounting Style . Solid State Switches . General Purpose Type. D-F79/D-F7P/D-J79 Rail Mounting Style. D-F7NV/D-F7PV/D-F7BV Rail Mounting Style .

1

Solid state auto switch: D-H7, D-H7C, D-H7W, D-H7NF, D-H7BA Reed auto switch: D-C7, D-C80, D-C73C, D-C80C, D-A80, D-A9, D-A9V, D-A79W, D-A73 Note 2) The maximum manufacturable stroke of this cylinder is 150 mm for both A and B. 1) Initial state (0 stroke position) Stroke B Stroke A 2) Operation When the air pressure is supplied from the A C B Stroke A port, the rod operates the stroke A.

MXQ

Solid State Switch: D-M9B, D-M9N, D-M9P, D-F9BW, D-F9NW, D-F9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 40 50 150 75 100 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MXQ8 26 2 2 6