Table of Contents

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Normally closed (NC=b contact), solid state switches (Model D-F9G, F9H) are also available. For detail, refer to page 7-9-23 in the Best Pneumatics 2004 Vol. 7 catalog.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

Compact Hydraulic Cylinder

(Example) CHDQB50-100D Applicable Auto Switches/Refer to pages 431 to 490 for further details on each auto switch.

CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B'

Compact Cylinder with Lock Series CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B

CLQ

75D x 165l x 190l -100D -100D -100D x 190l x 215l 9-10-11 11 Series CLQ Construction: 20 to 32 i o !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Hydraulic

(M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l CHQB100 10D

EXxx-OMK0006

Error Control Services are not set on shipment. (100C, 100D, 1016, 1017h = 0) Node Guarding Protocol and Heartbeat Protocol are not able to be used at the same time. If both Node Guarding Protocol and Heartbeat Protocol are set at the same time, the Heartbeat Protocol is used.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

CHQWB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) 100D (M) 75D (M) 100D (M) CH QWB50 10D (M) 15D (M) 20D (M) 25D (M) 30D (M) 35D (M) 12 40D (M) 45D (M) 50D (M) 75D (M) 100D (M) 38 Series CHQWB Construction CHQWB20 Rod end male thread CHQWB32 to CHQWB100 Rod end male thread

A

P Q R SA SB SC TA TB UA MHS3-100D 4 34 18h9 -0.043~0 7.5 Rc(PT)1/4 23 118 9 14 21 M4x1.25 16 M8x1.25 MHS3-125D 6 40 22h9 -0.052~0 10.5 Rc(PT)3/8 31 148 11 17.5 34 M10x1.5 20 M10x1.5 Part No UB VA VB WA WB XA XB MHS3-100D 16 8H9 0~0.036 6 102H9 0~0.087 4 8H9 0~0.036 6 MHS3-125D 20 10H9 0~0.036 8 130H9 0~0.1 6 10H9 0~0.036 8 (mm) Courtesy of Steven Engineering, Inc. !

CATALOG

Part No M NA NB O P Q R SA SB SC TA TB UA MHS3-100D 4 34 18h9 -0.043~0 7.5 Rc(PT)1/4 23 118 9 14 21 M4x1.25 16 M8x1.25 MHS3-125D 6 40 22h9 -0.052~0 10.5 Rc(PT)3/8 31 148 11 17.5 34 M10x1.5 20 M10x1.5 Part No UB VA VB WA WB XA XB MHS3-100D 16 8H9 0~0.036 6 102H9 0~0.087 4 8H9 0~0.036 6 MHS3-125D 20 10H9 0~0.036 8 130H9 0~0.1 6 10H9 0~0.036 8 (mm) NOTE) FOR MHS2 AND MHS4 DIMENSIONS AND MORE