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1

Do not remove the seal cap. 5 Connector (Unused) EX600-ED2EX600-ED3w e r e r INDEX w 278 Series EX600 Dimensions SI Unit EX600-SPRA EX600-SDNA EX600-SMJ EX600-SEN EX600-SEC EX600-SPN 10.7 47 55.2 10.7 55.2 47 23.7 26 26 106 106 22 22 11.5 56.4 22.1 106.5 56.4 8 22.1 End Plate 42.5 5.5 EX600-ED2 EX600-ED3 26 85.1 5.5 20.5 20.5 8 90 8 90 106 106 30.35 13.2 30.35 56.6 36.65 30.2 73.6 56.6 13.2

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

Secondary Batteries

90-CQ-F020 90-CQ-F025 90-CQ-F032 90-CQ-F040 90-CQ-F050 90-CQ-F063 90-CQ-F080 90-CQ-F100 91-CQ-F012 91-CQ-F016 91-CQ-F020 91-CQ-F025 90-CQ-F032 90-CQ-F040 90-CQ-F050 90-CQ-F063 90-CQ-F080 90-CQ-F100 90-CQ-L012 90-CQ-L016 90-CQ-L020 90-CQ-L025 90-CQ-L032 90-CQ-L040 90-CQ-L050 90-CQ-L063 90-CQ-L080 90-CQ-L100 91-CQ-L012 91-CQ-L016 91-CQ-L020 91-CQ-L025 90-CQ-L032 90-CQ-L040 90-CQ-L050 90-CQ-L063

Table of Contents

D-A90 cannot be mounted on Series MY1HT.

Table of Contents

65 90 90 90 90 90 Q 171 221 271 321 371 421 471 521 S 27 52 77 102 127 152 177 202 SS 128 153 178 203 228 253 278 303 Z 155 205 255 305 355 405 455 505 ZZ 199 249 299 349 399 449 499 549 Model CXWL25-25 CXWL25-50 CXWL25-75 CXWL25-100 CXWL25-125 CXWL25-150 CXWL25-175 CXWL25-200 8-26-44 43 Series CXWL Slide Unit: Build-in Shock Absorber Slide Bearing Type 25 With End Lock: CXWL25Stroke/25

Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

Free Mount Cylinder

Auto Switch Specifications Grommet Electrical entry : In-line PLC: Abbreviation for Programmable Logic Controller D-A90/D-A90V (without indicator light) D-A90/D-A90V Auto switch part no.

ISO Cylinder

A90V A90 V V IC circuit Relay, PLC 24 V 12 V 2-wire Yes C73C A73C V V V V Connector No 24 V or less C80C A80C V V V V IC circuit Diagnostic indication (2-color indicator) Grommet Yes A79W V V 1 Water resistant type auto switches can be mounted on the above models, but SMC cannot guarantee water resistance.

Smooth Cylinder/Low Speed Cylinder

95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L

Table of Contents

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

CXS

, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series CXS Made

Hydraulic

Same side 75 90 120 (n 4) 2 120 + 50 (n 2) 2 90 + 50 (n 4) 2 20 + 50 Different sides D-B59W n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6 120 + 5 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6, 8 120 90 1 pc. 15 35 80 90 Different sides 75 100 Same side 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

5

90 15 158 132 184 26 13.5 24 17 75 100 129 25+0.084 0 Double clevis pivot bracket B DX Z + Stroke DD DB B 90 4 x DT B A DS DH DE DC DO DO 4 x DR DA DL DU DU (mm) Part no.

Rotary Table/

Rotation 90 Rotation 90 Rotation 9 Rotary Table Series MSQ Construction o i t !

MY1

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

Table of Contents

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.