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Table of Contents

point L (mm) Gripping point L (mm) 15 15 5 5 10 10 20 20 25 25 30 30 MHW F F MRHQ MHS3-20D MHS3-20D 40 Pressure 0.6 MPa Misc. 35 Pressure 0.6 MPa 35 30 External grip 0.5 MPa 0.5 MPa DGripping force (N) Gripping force (N) 30 25 25 20 20 15 15 0.4 MPa 0.4 MPa F 200.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 5 5 0 0 5 5 25 25 10 10 15 15 20 20 30 30 35 35 Gripping point L (mm) Gripping point L (mm

High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

32 40 50 10 16 25 40 8 10 13 16 20 25 32 40 4 6 6 50 Dia.

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

0.7 MPa 16 to 25: 0.25 to 0.7 MPa 10 to 60C 0.01 mm 180 c.p.m.

MHZ

0.7 MPa 16 to 25: 0.25 to 0.7 MPa 10 to 60C 0.01 mm 180 c.p.m.

XM, XY

Angle type M9N A 25 In-line type q w e r t y u w Flange type XMD q Flange size Size Symbol Type Applicable flange size XMD XYD 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) KF (NW) K (DN) CF 25 40 50 63 80 Nil D C XYD D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 Nil e Pilot port direction Rear flange surface XMD Rear flange surface XYD Symbol Pilot port direction Flange side Left flange surface

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

NCQ8

L M9NL 197in (5 m) .

Table of Contents

3 25, 25: 2 Qty.

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

1

Cable 0.3 mm2 x 25 cores O.D. 1.4 Lead wire color Dot marking Terminal no.