Solid State Auto Switch:

[mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51 17-E683 D-M9m-5

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

M (Example) M9NM 3 m . L (Example) M9NL 5 m .

RS2H-OM0045P

DC AC 0.5 1 3 5 () (M) (L) (Z) M9NV M9N IC 3 NPN 5V 3 PNP M9PV M9P 12V 2 12V M9BV M9B M9NWV M9NV IC 3 PNP M9PWV M9PW 3 NPN 5V 12V 2 2 12V M9BWV M9BW 24V M9NAV M9NA IC 3 PNP M9PAV M9PA PLC 3 NPN 5V 12V 2 2 12V M9BAV M9BA 2 2 P3DW 3 NPN A96V A96 IC 12V 100V A93V A93 2 24V 5V 100V A90V A90 IC PLC 12V 0.5m D-M9N M 1m D-M9NM L 3m D-M9NL Z 5m D-M9NZ 1 17 - 7-2. -1516

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action

Compact Hydraulic Cylinder

CHQ CHQ C D CHK Mounting Bolts CHQWB20-5D (M) C D C D Model Mounting bolt part no. Model Mounting bolt part no.

Hydraulic

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l 5D (M) CHQB63 10D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105

42

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

CLQ

CLQB: Without Built-in Magnet CL CL1 Model C D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB80-10D 55