Magnet: Built-in, Mounting: Front Flange, Style: Non-lube, Bore Size: 100mm, Port Thread: -, Stroke: 50mm, Option: w/o Rod Boot, Cushion: Both Sides, Auto Switch: A44--Reed, DC Volt >5 <24, AC Volt <200, LED, DIN, None, Lead Wire or Prewired Connector: -, Number: 1 pc., Valve Voltage: 24VDC, Solenoid Style: 2 Position Double, Valve Type: DIN Connector, Cylinder Rod Motion: -

1

05D-C6 1 set (Type 50 5-station manifold base part no.)

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Table of Contents

SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Table of Contents

Load Weight Allowable Moment MY1H/m3 MY1H/M1 MY1H/M2 MY1H/M3 (1) (4) (2) (3) (5) (1) (2) (3) (5) 40 50 50 40 50 40 50 (4) 40 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 Load weight (kg) MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 Moment (Nm) Moment (Nm) Moment (Nm) 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25

Free Mount Cylinder

25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 9 9 13.5 2 4.5 4.5 4.5 3.5 5 5 5 With auto switch S Without auto switch Bore size (mm) 5 st 38 41 45 41 45 47 S Z Z 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 56 62 66 65 73 79 10 st 66 72 76 75 83 89 15 st 76 87 91 90 98 104 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5

ISO Cylinder

n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C D-M9lV D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting

Table of Contents

63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

Table of Contents

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

Smooth Cylinder/Low Speed Cylinder

B LS A 57.2 67.2 63.7 73.7 66.7 76.7 33 43 39.5 49.5 40.5 50.5 17 27 23.5 33.5 17.5 27.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 32 67.2 38.5 43 27 17 6.6 Special cap bolt LH LY 40 49.5 33.5 73.7 38.5 17 6.6 50 50.5 27.5 76.7 43.5 18 9 Y X Y X LS + Stroke LG LX LZ 4 x LD LT Bore size (mm) Stroke range (mm) LG LH Y LT LX LY LZ X A + Stroke 5 to 50 75, 100 5 to 50 75, 100 10 to 50

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications 5. Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6.

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Rotary Actuator/Vane Type

cord 3-wire (NPN) V V V v v IC circuit 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v Solid state auto switch XC1 Add connecting ports W, J Yes For 10, 15 3-wire (NPN) 5 V, 12 V S99V S99 V V v v IC circuit 3-wire (PNP) S9PV S9P V V v v XC2 Change threaded hole to through-hole W, J Relay, PLC Grommet 24 V 2-wire 12 V T99V T99 V V v v 5 V, 12 V 5 V, 12

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Made to Order

(mm) A B Bore size (mm) 50 st or less for both of S1, S2 Stroke Both of S1, S2 L Combination of 50 st or less, 75, 100 st 75, 100 st for both of S1, S2 50 st or less 75, 100 st 12 16 20 25 32 40 50 63 80 100 41 (63) 3.5 17 (28) 5 to 30 44 (68) 3.5 18.5 (30.5) 48 (72) 4.5 19.5 (31.5) 5 to 50 55 (75) 5 22.5 (32.5) 70 (80) 80 (80) 60 (80) 7 23 (33) 33 (33) 5 to 100 83 (93) 93 (93

5

(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50

Electric Actuator/Slider Type

: Horizontal LEJB63/Belt Drive: Horizontal 20 20 The value of 50% or less is the same as duty ratio 50% The value of 50% or less is the same as duty ratio 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 15000 15000 Duty ratio: 50% Duty ratio: 50% Duty ratio: 75% Duty ratio: 75% 10 10 Duty ratio: 100% Duty ratio: 100% 5000 5000 0 0 0 5 10 15 20 0 5 10 15 20 25 30 Work

Auto Switch Guide

RHC Load voltage 24 VDC 100 VAC 200 VAC Load current range (2) 5 to 50 mA 5 to 25 mA 5 to 12.5 mA MK(2) Contact protection circuit Built-in Internal voltage drop RS Q G 2.4 V or less (to 20 mA)/3.5 V or less (to 50 mA) Indicator light Auto Switch Internal Circuit D-A33C Red LED lights when ON.