Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

1

16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 * Manufacture of intermediate strokes at 1 mm intervals is possible.

Smooth Cylinder/Low Speed Cylinder

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder.

2

P R V Nil 1 2 3 Size Size Air compressor size Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

Hydraulic

D-A59W 20 115 115 125 130 140 150 Same side 1 pc. 15 10 Different sides 2 pcs. D-F5, D-J5 10 115 115 120 130 140 150 Same side 1 pc. 10 10 Different sides D-F5W, D-J5W D-F5BAL 2 pcs. 10 120 120 120 135 140 150 Same side 1 pc. 10 10 Different sides 2 pcs.

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Free Mount Cylinder

Note 1) In the case of ZCUKR16-5D: 14.5 mm.

CLQ

CLQB: Without Built-in Magnet CL CL1 Model C D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB80-10D 55

CLQ

175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D

Compact Cylinder with Lock Series CLQ

175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D

42

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

Electromagnetic Digital Flow Switch

The straight piping length shall be 5 times (5D) or more of the piping size to achieve the stable measurement. 3 Accuracy change [% F.S.] 2 [mm] 1 Model Straight piping length D 5D LFE1 11 55 LFE2 21 105 LFE3 27 135 [Port size] [Measurement conditions] Fluid: Tap water Pressure: 0.2 MPa 0 D 2D 3D 4D 5D LFE1: 3/8 inch LFE2: 3/4 inch LFE3: 1 inch 0 Straight piping length Operating Pressure

V100

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

LEC-OM07605CN

(3)DO-2() (a) 35mA LA (LB LZ) L A (LB LZ) 100 Am26LS32 150 LAR (LBR LZR) LAR (LBR LZR) LG SD SD (b) CCW LA (T)[Pr. PA15][Pr.

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

VQ4000

Fluid 1.0 MPa (0.7 MPa) (3) Maximum operating pressure Valve specifications Solenoid specifications Single 0.20 MPa 0.15 MPa Min. operating pressure Double 0.15 MPa 0.15 MPa 3 position 0.20 MPa 0.15 MPa (1) (1) 5 to 50C 10 to 50C Ambient and fluid temperature Lubrication Not required Plug lead unit Manual override Push type/Locking type (Tool required) Option Shock/Vibration resistance 150

VQ5000

position closed center 3 position 0.15MPa [21.75] 0.20MPa [29psi] (A) 4 (B) 2 Proof pressure 1.5MPa [217.5] 10 to 50C (14 to 122F) 5 to 50C (23 to 122F) Note 1) Note 1) Ambient and fluid temperature 1 (P) 5 (R1) 3 (R2) Lubrication Not required Manual override Non-locking push type/Slotted locking type (tool required) optional 3 position exhaust center (A) 4 (B) 2 Impact/Vibration resistance 150

LV50-OMQ0002

The straight piping length shall be 5 times (5D) or more of the piping size to satisfy and achieve the stable measurement.