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Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～12, Tube Material: Stainless Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 150, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～60, Support Type: [Rod Side Flange] Rod-Side Square-Flanged Type, Standard: ISO

Magnet: D (With Magnet), Mounting: FY (Front Rectangular Flange Type), Bore Size: 40mm, Port Thread Type: Rc, Stroke: 150mm, Rod End Nut: Without Rod End Nut, Cushion: With Cushion in Both Sides, Port Position: B (Port on Top - Cushion Valve Down)

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Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm

Table of Contents

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves.

Table of Contents

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

ISO Cylinder

A B Hs Hs Hs Hs Hs Hs Hs Hs Hs Hs D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9lV 17 B A A B D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-F7l D-F7lW D-J79 D-J79W D-F7BA D-F79F D-A7lH D-A80H 17 A B A B D-F7lV D-F7lWV D-F7BAV D-A7l D-A80 D-A79W D-H7C 17 A B A B D-C73C D-C80C D-J79C D-A73C D-A80C 17 Auto Switch Made to Order B A B A 102 C85/C75 Series Auto Switch Proper Mounting

Table of Contents

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Smooth Cylinder/Low Speed Cylinder

A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Air Cylinder

CM2 A B Z 40 150 CDM2 With auto switch M9BW 150 A B 40 Z Port thread type Number of auto switches Rod end bracket With auto switch (Built-in magnet) Nil Rc TN NPT TF G Nil None V Single knuckle joint W Double knuckle joint Mounting Nil 2 pcs. S 1 pc. n n pcs.

Made to Order

B port D port C port A port CJ2 series (mm) NB S Z Bore size (mm) 10 21 36.5 150 Z + Stroke (A + B) S + Stroke B S + Stroke A 16 21 37.5 152 C port D port CM2 series (mm) A port B port Stroke B Stroke A Bore size (mm) GC GD SA SB ZZ 20 7 24 47 78 207 25 7 24 47 78 215 32 7 24 49 80 219 SB + Stroke B ZZ + Stroke (A + B) SA + Stroke A 40 10.5 33.5 66.5 110.5 277 WC CG1 series A port C port

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

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For details, refer to page 1004. 182 Smooth Cylinder MBY Series 32, 40, 50, 63, 80, 100 REA How to Order REB 40 B 150 MBY Z REC Smooth Smooth With auto switch (Built-in magnet) M9BW 40 150 B Z With auto switch MDBY Low Speed Made to Order Refer to page 184 for details.

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.