1

D16 For 16 stations Note) Refer to page 261 for the fixation of DIN rail mounting type manifold. Terminal block plate assembly Manifold base (5 stations) SS5Y3-12S4V-05D SS5Y3-12S4V-05D 1 set (Type 12 5-station manifold base part no.) SY3130-5U1-C6 3 sets (2-position single part no.) SY3230-5U1-C6 1 set (2-position double part no.)

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Double clevis style CS1-D12 CS1-D14 CS1-D16 Order two foot brackets per cylinder. Cylinder with Auto Switch Accessory For auto switch specifications of low friction style, refer to the standard double acting single rod series rod (Series CS1) on page 69-8.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

D16 For 16 stations Note) For D0, only DIN rail mounting bracket is attached.

Aluminum High Vacuum Angle Valve

D16 X65 XLA XSA Pilot port direction Seal material changed part Bonnet assembly XVD Symbol Nil Rear (as seen from body connection point) Left (as seen from body connection point) Right (as seen from body connection point) K M Pilot port direction Temperature 5 to 60C 5 to 150C XLG100-30-1-1 XLG100-30-1H-1 Part no.

High Vacuum Angle Valve

D16 X65 XLA XSA Pilot port direction Seal material changed part Bonnet assembly XVD Symbol Nil Rear (as seen from body connection point) Left (as seen from body connection point) Right (as seen from body connection point) K M Pilot port direction Temperature 5 to 60C 5 to 150C XLG100-30-1-1 XLG100-30-1H-1 Part no.

SV

D16 For 16 stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A1W DIN rail length specified Enclosure IP67 specifications Series Standard length Nil 3 1 2 SV1000 SV2000 For 3 stations (

Series SV

Nil D D0 Note) D3 Series 1 2 3 4 SV1000 SV2000 SV3000 SV4000 For 3 stations D16 For 16 stations Note) In case of D0, only DIN rail fittings are attached. Tie-rod base SS5V 1 A D 05 U 10S3 Cassette base U SS5V D 05 16S3 1 A Series DIN rail length 1 2 SV1000 SV2000 Standard length Nil 3 Specify a rail longer than the standard length.

CL

BT-12 BT-12 BT-16 Rod side flange style CA-F06 CS1-F16 CS1-F14 CS1-F12 CA-F05 CA-F10 CA-F04 CA-F08 DBD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BS1-125 BS1-140 BS1-160 CA1-F06 CS1-F16 CS1-F14 CS1-F12 CA1-F05 CA1-F10 CA1-F04 CA1-F08 Head side flange style CA1-C06 CS1-C16 CS1-C14 CS1-C12 CA1-C05 CA1-C10 CA1-C04 CA1-C08 Single clevis -X BA-04 BA-05 BA-06 BA-08 BA-10 Double clevis CA1-D06 CS1-D16

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9) Model 52 64 CRBU2 CDRBU2WU40 0 0.030 4 20 0 0.030 4 CRB1 85 MSU CRJ 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16

ZP

Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16

ZP

Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16 14 2031 53 B port A port (145) 2-M5 x 0.8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16 14 2031 53 B port A port (145) 2-M5 x 0.8

MQQ

ML2B W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End C J G5-S Allowable Lateral Load at Rod End CV 12 MVGQ 25 10 CC Maximum allowable lateral load W (N) RB 8 J 20 6 D16 -X 4 202 10 Data 6 30 60 75 100 Stroke (mm) Note) The allowable lateral load varies depending on the size of the load (the distance to the loads center of gravity).

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

Table of Contents

ML2B W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End C J G5-S Allowable Lateral Load at Rod End CV 12 MVGQ 25 10 CC Maximum allowable lateral load W (N) RB 8 J 20 6 D16 -X 4 202 10 Data 6 30 60 75 100 Stroke (mm) Note) The allowable lateral load varies depending on the size of the load (the distance to the loads center of gravity).

CQS

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 0.5 19.5 5 10 6 5 5 10 17 0.5 1 [3.5] 6 16 1 21.5 5.5 9.5 5.5 4.5 5.5 9.5 19 1 0.5 [3] 5.5 Bore size (mm) RQ 20 5 25 9.5 13 9 0.5 9.5 13 22.5 5 3.5 [1] 9 25 7 27 11.5 14 10 1.5 11.5 14 24.5 7 5.5 [3] 10 MU Double Acting, Double Rod 12 19.5 9.5 5.5 0.5 9.5 5.5 5.5 1.5 17 5.5 3.5 [6] 1.5 D16

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load

CL

CA-F05 CA-F10 CS1-F12 CA-F04 CA-F08 CS1-F14 CS1-F16 DBD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BS1-125 BS1-140 BS1-160 CA1-F06 CA1-F05 CA1-F10 CS1-F12 CA1-F04 CA1-F08 CS1-F14 CS1-F16 Head side flange style CA1-C06 CA1-C05 CA1-C10 CS1-C12 CA1-C04 CA1-C08 CS1-C14 CS1-C16 Single clevis -X BA-04 BA-05 BA-06 BA-08 BA-10 Double clevis CA1-D06 CA1-D05 CA1-D10 CS1-D12 CA1-D04 CA1-D08 CS1-D14 CS1-D16