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MODEL VM2 SMC 54 71 177 152 Lock lever LOCK UNLOCK T.T. 2.5 (70) 30 18.5 11 B A XT34-60/67 INDEX 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) Rc1/8 (Port 1) 352 0.2 32 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 XT34-60/67 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) 3 x 6.5 mounting hole 53 XT34-67 (Without lock) 159 3 x 6.5 mounting hole MODEL VM2 SMC 54 71 177 152 T.T. 2.5 (70) 30 18.5

High Vacuum Angle Valve

M12, L = 70 Refer to part no.

Table of Contents

50 70 Note 1) J dimension is at fully closed.

Table of Contents

X 60 70 ZZ 180 192 Model CY1B50 CY1B63 Mounting Nut/included (2 pcs.)

Aluminum High Vacuum Angle Valve

M12, L = 70 Refer to part no.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Table of Contents

100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Table of Contents

x 0.8 7.5 M8 x 1.0 REAS20 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 M10 x 1.0 REAS25 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0 11 M14 x 1.5 REAS32 64 27 17 M10 x 1.5 x 15 85 8.7 12 M8 x 1.25 11.5 M20 x 1.5 REAS40 74 31 14 M10 x 1.5 x 15 95 8.7 12 M8 x 1.25 10.5 M20 x 1.5 PA P PB PW Q QW S T TT ta tb W Z Model REAS15 M5 x 0.8 30 50 75 75 30 62 12.5 22.5 0.5 1 72 97 REAS20 Rc 1/8 40 70

ISO Cylinder

Single foot: Cl85WEl lL (With mounting bracket) (W) LT NH LT (XS) 2 x AB Double foot: Cl85WEl lM (With mounting bracket) (W) LT UR 4 x AB NH LT (XL + Stroke) LS + Stroke AV US TR AO [mm] Bore size AB AO AV LS LT NH TRJS14 UR US (W) (XL) (XS) 8 4.5 5 11 70 {76} 3.2 16 25 26 35 12.8 75 {81} 23.8 10 4.5 5 11 70 (75) 3.2 16 25 26 35 12.8 75 (80) 23.8 12 5.5 6 14 80 (82) 4 20 32 33 42 18 88 (

Smooth Cylinder/Low Speed Cylinder

75 80 85 90 95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

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= 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9l n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 45 50 55 60 70 D-A9lV n 45 + 30 (n 4) 2 (n =

Electric Actuator/Slider Type

10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LEYG25M LEYG25M 0.1 0.1 100 1000 70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200 mm/s or less !

Made to Order

70 70 80 80 110 110 c 43 43 43 50 50 70 70 ZZ 318 318 336 378.5 378.5 476 496 With auto switch 180: 382.5, 200: 387.5 d 36 36 36 45 50 60 70 e 27 27 27 37.5 37.5 50 50 f 40 40 40 45 45 55 55 h 110 110 110 132.5 132.5 175 175 i 90 90 90 115 115 140 140 Bore size (mm) 125 140 160 180 200 250 300 M30 x 1.5 M30 x 1.5 M30 x 1.5 M42 x 1.5 M42 x 1.5 M56 x 2 M56 x 2 c + Adjustment h + Stroke

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50 4.6 13 60 M3 x 12 M4 x 12 14 NY 2 x M4 x 0.7 8 70 50 4.6 13 60 M3 x 12 M4 x 12 11 NW 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 M4 x 12 9 NU 2 x M5 x 0.8 8.5 70 50 4.6 10.6 60 M3 x 12 M4 x 12 11 NT 2 x M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 M4 x 12 12 NM2 M4 x 0.7 8 50 38.2 11.5 60 7 M3 x 12 M4 x 12 10 32 NZ 4 x M5 x 0.8 8.5 70 50 4.6 11 60 M4 x 12 M4 x 12 14 NY 4 x M4

High Vacuum Angle Valve

70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !