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Table of Contents

MGPL25-75A is selected.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

47.1 IN 982 589 491 393 295 196 687 98.2 OUT CXS25 12 756 454 378 302 227 151 529 75.6 IN 1608 965 804 643 482 322 1126 161 OUT CXS32 16 1206 724 603 482 362 241 844 121 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 100 90 80 75 70 60 40 50 45 30 35 20 25 10 15 CXSM6 CXSL6 CXSM10 CXSL10 CXSM15 CXSL15 CXSM20 CXSL20 CXSM25 CXSL25

AFF

20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Port size 20 2BJIS 10k flange 30 3BJIS 10k flange 40 4BJIS 10k flange 14-20-10 3 Main Line Filter Series AFF Flow Characteristics/Select the model taking the max. flow capacity into consideration.

Table of Contents

20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Port size 20 2BJIS 10k flange 30 3BJIS 10k flange 40 4BJIS 10k flange 14-20-10 3 Main Line Filter Series AFF Flow Characteristics/Select the model taking the max. flow capacity into consideration.

2

Rc thread and G thread: 12 NPT thread: 1/2" (Maintenance space 100 mm or more) IDG60, 75, 100 IDG60A, 75A, 100A With fitting for purge air discharge (Semi-standard: P) Port size L 91 82 60 50 Purge air for dew point indicator Purge air discharge tubing port for dew point indicator 2.3 14 17 7 Applicable tubing O.D.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/12857 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS25, CXSL25 10-/11221221Air Preparation Equipment

CXS

(kg) Standard stroke (mm) Model 75 35 70 30 60 25 50 20 45 40 80 90 100 0.70 0.54 0.66 0.52 0.62 0.50 0.60 0.58 0.56 0.715 0.735 0.755 0.815 CXSM20-A 0.72 0.56 0.68 0.54 0.64 0.52 0.62 0.60 0.58 0.735 0.755 0.775 0.835 CXSL20-A 0.96 0.80 0.92 0.78 0.88 0.86 0.84 0.82 0.98 1.00 1.04 1.08 CXSM25-A 0.97 0.81 0.93 0.79 0.89 0.87 0.85 0.83 0.99 1.01 1.05 1.09 CXSL25-A 1.92 1.53 1.82 1.48 1.72

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

0.42 0.43 0.46 0.49 0.51 0.52 0.55 0.58 CXSL15-XB19 0.34 0.36 0.37 0.38 0.32 0.41 0.42 0.44 0.45 0.48 0.51 0.53 0.54 0.57 0.60 CXSM20-XB19 0.52 0.54 0.56 0.58 0.60 0.62 0.63 0.65 0.67 0.71 0.74 0.76 0.78 0.82 0.86 CXSL20-XB19 0.55 0.57 0.58 0.60 0.62 0.64 0.65 0.67 0.69 0.73 0.76 0.78 0.80 0.84 0.87 CXSM25-XB19 0.75 0.78 0.80 0.83 0.86 0.89 0.91 0.94 0.97 1.03 1.09 1.11 1.14 1.20 1.24 CXSL25

42

Silencer box assembly: VVQ5000-75A (With gasket, screw) Type SU Specifications Caution Double check spacer with residual pressure exhaust VVQ5000-25A-1 (Plug-in type) VVQ5000-25A-5 (Plug lead type) Handling Precautions Double check spacer part no. VVQ5000-25A1 5 Intermediate stop Drop prevention Can hold an intermediate cylinder position for an extended time.

MG

MGPL25-75A is selected.

Thermo-chiller

Oscillator Oscillator HRLE090 HRS012 HRS090 + Reduced by 0.13 m2 + 0.43 m2 0.37 m2 0.19 m2 965 mm 970 mm 500 mm 445 mm 377 mm 377 mm Globally compatible power supplies 50 Hz 60 Hz 50/60 Hz Power consumption reduced by 17% Energy saving 3-phase 200 VAC 3-phase 200 to 230 VAC 3-phase 380 to 415 VAC 3-phase 460 to 480 VAC Single-phase 200 to 230 VAC HRLE Series : HRLE090 : HRLE050 CAT.ES40-75A

MGP

MGPL25-75A is selected.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Includes bushing assembly (SY7000-70-1A) 3 pcs. 1 SY760--(-Q) Valve 1 3 2 SUP/EXH block assembly SY7000-75A(-Q) 3 End block assembly SY7000-56-1A(-Q) In common for D side and U side (Bushing assembly: Not available for SY7000-70-1A.) 4 Bushing assembly SY7000-70-1A 5 VZ1000-11-4DIN rail Refer to page 186.

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure