Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 300mm, Adjuster: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 450mm, Adjuster: A (Both Sides: 25mm Adjusting), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 150mm, Adjuster: A (Both Sides: 25mm Adjusting), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 250mm, Adjuster: Both Sides Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

50, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.2 to 0.7, Environment: General Purpose, Maximum Load(kg): 5, Operating Speed(mm/s): 50～500, Allowable Static Moment MA(N⋅m): 1.5, Allowable Static Moment MB(N⋅m): 3, Allowable Static Moment MC(N⋅m): 1.5, Connection Diameter: M5, Piping Format: Left-side centralized piping, Port Screw Type: M, Auto Switches: A93

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 450mm, Adjuster: Both Sides: 25mm Adjusting, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 150mm, Adjuster: Both Sides: 25mm Adjusting, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: L (Left Side Centralized Piping), Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 15mm, Port Thread: M thread (ø10, ø15) Rc threads (ø25), Piping: Left Side Centralized Piping, Stroke: 300mm, Adjuster: Both Sides Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

1

Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable. Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added!

Table of Contents

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Table of Contents

the speed of 300 mm/s.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Table of Contents

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

ISO Cylinder

301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch Made to Order Bore size Stroke Item Reference (Wh) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 23.5 10.5 51 64 76 89 114 139

Air Cylinder

depth 12 6 14 50 Up to 300 301 to 1500 35 32 27 32 20 30 2 14 58 11 58 M8 x 1.25 depth 16 7 18 63 Up to 300 301 to 1500 35 32 27 38 20 32 2 14 58 11 72 M10 x 1.5 depth 16 7 18 80 Up to 300 301 to 1500 40 37 32 50 25 40 3 20 71 13 89 M10 x 1.5 depth 22 10 22 100 Up to 300 301 to 1500 40 37 41 60 30 50 3 20 71 16 110 M12 x 1.75 depth 22 10 26 CG3 JMB MB MB1 * For mounting brackets, refer to

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s