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Table of Contents

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

Basic Type/Direct Mount Type

2 y r i q 2b 3b CY3RG15 to 63 !9 @2 @0 @3 #0 @5 @8 @7 o u !7 t 18b CY3RG15 CY3RG15, 20 CY3B CY3R CY3B CY3R !9 !8 @2 @1 CY1S CY3RG15 CY1L Switch Rail Accessory CY1H CY1F Switch Rail Accessory Kit B 100 (N) CYR 15 E Bore size (mm) 6 10 15 Kit no. Both sides piping Centralized piping CYR6EBContents CYP Bore size Numbers , , !9, @2, @7 above Numbers , , !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard Stroke Bore size (mm) Standard stroke (mm) Manufacturable Note) maximum stroke (mm) 6 300 50, 100, 150, 200 10 500 50, 100, 150, 200, 250, 300 50 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 6000 63 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

Magnetically Coupled Rodless Cylinder

7 t CY3RG15, 20 CY3RG15 !9 !8 @2 @1 CY3RG15 Replacement parts: Seal kits Contents Bore size (mm) 15 20 25 32 40 Kits no. CY3R15-PS CY3R20-PS Numbers CY3R25-PS @4,@5,@6,@7,@8,@9,#0 CY3R32-PS at the left CY3R40-PS Seal kits are the same for both the both sides piping type and the centralized piping type. Switch Rail Accessory Switch rail accessory kits CYR 15 E Bore size (mm) Kits no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

7 t CY3RG15, 20 CY3RG15 !9 !8 @2 @1 CY3RG15 Replacement parts: Seal kits Contents Bore size (mm) 15 20 25 32 40 Kits no. CY3R15-PS CY3R20-PS Numbers CY3R25-PS @4,@5,@6,@7,@8,@9,#0 CY3R32-PS at the left CY3R40-PS Seal kits are the same for both the both sides piping type and the centralized piping type. Switch Rail Accessory Switch rail accessory kits CYR 15 E Bore size (mm) Kits no.

Table of Contents

150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

smcmaintenancepartslist

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Free Mount Cylinder

Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Normally closed (NC=b contact), solid state switches (Model D-F9G, F9H) are also available. For detail, refer to page 7-9-23 in the Best Pneumatics 2004 Vol. 7 catalog.

NCQ8

L M9NL 197in (5 m) .

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.