Size: 25, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 100mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 400mm, Motor Option: B (with Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 50mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: D (In-line), Motor Type: H (Battery-less Absolute, Step Motor 24 VDC), Lead, mm: C (Size 16: 2.5; Size 25: 3; Size 32: 4), Stroke: 50mm, Motor Option: B (with Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Rod Flange), Controller Position: B (Integrated Controller), Parallel Input: 6 (PNP)

Size: 25, Motor Mounting Position: In-line, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 3; Size 32: 4, Stroke: 400mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: Integrated Controller, Parallel Input: PNP

Size: 25, Motor Mounting Position: In-line, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 3; Size 32: 4, Stroke: 400mm, Motor Option: with Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: Integrated Controller, Parallel Input: PNP

Size: 25, Motor Mounting Position: In-line, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 3; Size 32: 4, Stroke: 100mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Controller Position: Integrated Controller, Parallel Input: PNP

Size: 25, Motor Mounting Position: In-line, Motor Type: Battery-less Absolute, Step Motor 24 VDC, Lead, mm: Size 25: 3; Size 32: 4, Stroke: 50mm, Motor Option: with Lock, Rod End Thread: Rod End Female Thread, Mounting: Rod Flange, Controller Position: Integrated Controller, Parallel Input: PNP

VM

VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM-30AY Yellow VM120-01-30Y VM120-01-32R VM122-M5-32R VM122-M5-32B VM122-M5-32G VM122-M5-32Y VM130-01-32R VM130-01-32B VM130-01-32G VM130-01-32Y VM132-M5-32R

VM

VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM-30AY Yellow VM120-01-30Y VM120-01-32R VM122-M5-32R VM122-M5-32B VM122-M5-32G VM122-M5-32Y VM130-01-32R VM130-01-32B VM130-01-32G VM130-01-32Y VM132-M5-32R

VM

VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM-30AY Yellow Red Black Green Yellow VM120-01-30Y VM-32AR Push button (Extended) VM120-01-32R VM122-M5-32R VM122-M5-32B VM122-M5-32G VM122-M5-32Y VM130-01-32R VM130-01-32B VM130-01-32G VM130-01

Micro Mechanical Valve Series VM1000

-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430-01-05 Polyacetal roller Hard steel roller Roller plunger VM430-01-06 VM430-01-06S VM430-01-07 VM430-01-07S Polyacetal roller Hard steel roller Cross roller plunger Toggle lever VM430-01-08 VM430-01-30R VM430-01-30B

Proposals for Energy Saving

VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red Push button (Extended) VM130-01-32R VM130-01-32B VM130-01-32G VM130-01-32Y VM132-M5-32R VM132-M5-32B VM132-M5-32G VM132-M5-32Y VM-32AB Black VM-32AG Green VM-32AY Yellow A set of Red, Black, Green, and Yellow included.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table (3) Guide block L3 L3 End face L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B Tightening torque (Nm) Model MXP10 MXP12 MXP16 1.67 8-8-5 5 Series MXP Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Enumerate the operating conditions considering the mounting position and workpiece configuration.

HRX-OM-X084

1 Brown Brown 20 Yellow 2 2 Black Blue 22 PM Orange C3 CM 3 EV2 24 FAN 3 Blue Blue Blue 4 Brown 18 Red 5 [G4] Yellow/Green Yellow/Green [G3] Option DM (CN6) 2/3 (CN5) 3/3 Red Brown 5 1 2 Black 5 LS1 Red Blue 6 Am 6 Black Red Brown 5 7 Yellow/Green LS2 4 8 Black Red Blue Black [G4] DI solenoid valve 1 Red Brown 15 FWD CM Black SVDI Blue 16 2 12 11 Option DM IV Water leakage detector 30C 30B

HRX-OM-W002

3 2 1 4 4 3 2 2 1 1 1 1 1 3 3 6 8 3 2 2 5 7 2 4 (CN2) (CN1) 1 1 3 3 2 2 4 4 YL BK BK BK BK BR RD RD RD RD RD RD RD WH BL Not connected at option Z SENSOR PCB4 USB Board + Display Board + 24COM OUT AOUT +24V PCB3 FM Water Leak Sensor Option DM DI Sensor Level Switch Level Switch WLS Solenoid Valve SVDI LS1 LS2 DI Option DM Cooling Fan (CN1) 3 6 2 5 4 1 FAN BR BR BL BL BL 11 FWD 12 CM 30C 30B

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) L K J V H S Z M MA W Model 36 40 93 82 58 20 102 40 30 65 MXP16-20B 42 50 119 108 70 30 128 56 46 75 MXP16-30B 14

ZP

Form w 1 Material e Vacuum inlet r Connection thread 10 13 16 04 B5 B6 4 20.6 10.4 3 N S U F GN GS 06 6 21.6 12.8 4 04 B5 B6 B8 4 23.3 10.4 3 06 6 24.3 12.8 4.5 08 8 26.2 15.2 6 40 50 06 B6 B8 6 24.3 12.8 4.5 08 8 26.2 15.2 6 20 25 32 ZP R U 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates the minimum hole size of the

1

LOCK FREE A B A 14 A B A 14 12 B 12 B 12 B Valve/Series SY3000 (Mixed Mounting) Plug 3/5(E) port Upward (Type U) Downward (Type B) Downward (Type B) [SUP/EXH block] [Valve] LOCK FREE LOCK FREE One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" : 6, 1/4" LOCK FREE LOCK FREE ( ) B6 : 10.7 BN7 : 13.2 6.5 16.9 4(A) port ( ) L6 : 32.9 LN7 : 35.4 2(B) port ( ) B6 : 9.7 BN7 : 7.2

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

A1 B1 (13.5) A6 B6 1 2 Nil Robotic cable (Flexible cable) S Standard cable Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Weight Signal Cable color Product no.