Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Y (None)

Model: 520 (2.0 to 16.0 L/min), Thread Type: F (G), Port Size: 04 (1/2), I/O Specifications: A2 (IN1: 4-20mA, IN2: External Control Input, OUT1: 4-20mA), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Z (with Operation Manual)

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 03 (3/8), I/O Specifications: A2 (IN1: 4-20mA, IN2: External Control Input, OUT1: 4-20mA), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Z (with Operation Manual)

Model: 504 (0.5 to 4.0 L/min), Thread Type: N (NPT), Port Size: 03 (3/8), I/O Specifications: A2 (IN1: 4-20mA, IN2: External Control Input, OUT1: 4-20mA), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Y (None)

Model: 520 (2.0 to 16.0 L/min), Thread Type: N (NPT), Port Size: 03 (3/8), I/O Specifications: A1 (IN1: 1-5 VDC, IN2: External Control Input, OUT1: 1-5 VDC), Lead Wire: C (Lead Wire with M12 connector, 3m, Bracket: R (with Bracket), Operation Manual: Y (None)

Model: 520 (2.0 to 16.0 L/min), Thread Type: R (Rc), Port Size: 04 (1/2), I/O Specifications: A2 (IN1: 4-20mA, IN2: External Control Input, OUT1: 4-20mA), Lead Wire: N (None), Bracket: R (with Bracket), Operation Manual: Y (None)

FLOW CONTROLLER FOR WATER. Flow Controller for Water. 730.00000 lb. Q54.

LEC-OM02704CN

)F RY(n1)F RX(n+2)0 RY(n+2)0 RX(n+2)1 RY(n+2)1 RX(n+2)2 1 RY(n+2)2 RX(n+2)3 2 RY(n+2)3 6 RX(n+2)4 3 RY(n+2)4 7 RX(n+2)5 4 RY(n+2)5 8 RX(n+2)6 5 RY(n+2)6 RX(n+2)7 6 RY(n+2)7 RX(n+2)8 7 RY(n+2)8 RX(n+2)9 8 RY(n+2)9 RX(n+2)A RY(n+2)A RY(n+2)B RX(n+3)9 RY(n2)C 1 RX(n+3)A RY(n2)D 2 RX(n+3)B Ready RY(n2)E 3 RX(n+3)C RY(n+2)F RX(n+3)F RY(n+3)9 RY(n+3)A RY(n+3)B RY(n+3)F . n 15 5 15

AC Servo Motor Driver (CC-Link Type)

No. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

AC Servo Motor Driver (CC-Link Type)

No. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

JXCx-OMT0061CN

Ry: U (1 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS Ry EMG C 24V 24V M 24V 0V 0V (3 ) BK RLS Ry EMG C 24V 24V M 24V 0V 0V OFF 24 - 3() DC24V M24V EMG () 0V DC24V Ry Ry: U (1 ) BK RLS EMG C 24V Ry 24V M 24V 0V 0V (2 ) BK RLS EMG C 24V Ry 24V M 24V 0V 0V (3 ) BK RLS EMG C 24V Ry 24V M 24V 0V 0V (1) DC24V M24V EMG 2M24V(SETUP ON) (M24V) 3M24VBK RLS 25 - 7.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

LECA6_C

Ry U (1 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (2 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (3 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V OFF 21 - (3) () DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (2 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (3 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V DC24V M24V EMG M24V(SETUP ON) (M24V

LECP6_C

Ry U (1 ) BK RLS EMG Ry C 24V 24V 0V 0V M 24V (2 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V (3 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V OFF 21 - 3() DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (2 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (3 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V DC24V M24V EMG M24V(SETUP ON) (M24V) M24VBK RLS 22 - 6.

JXCx-OMT0005CN

U Ry LK RLS6 Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V4 DC24V 0V LK RLS6 Ry (2 ) (3)EMG (2)M 24V (1)C 24V 0V4 DC24V 0V LK RLS(6) Ry 3 (3)EMG (2)M 24V (1)C 24V 0V(4) DC24V 0V OFF 28 - 32 DC24V M24V EMG () 0V DC24V Ry (1 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (2 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (3 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V

SFOD-OMT0005CN

Ry: U LK RLS (6) Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (2 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V OFF -28- (3)((2)) DC24V M24V EMG () 0V DC24V Ry (1 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (2 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (3 )

CA2

For Long Stroke Bore size (mm) 40 Stroke range (mm) RT RY 501 to 800 RY 601 to 1000 50 76 30 1001 to 1200 601 to 1000 63 1001 to 1200 92 40 751 to 1000 80 RT 1001 to 1400 112 45 751 to 1000 100 1001 to 1500 136 50 Stroke range (mm) A Bore size (mm) 40 50 63 80 100 B B1 C AL D E F G H1 J K KA LD LH LS LT Without rod boot With rod boot 60 9.0 up to 500 20 to 500 30 27 22 44 16 32

EXxx-OMZ0016

Bit area Input (RX) Output (RY) RDX EXW1-RDX* (16 points) 16 0 RDY EXW1-RDY* (16 points) 0 16 Compact wireless Remote RDM EXW1-RDM* (8 points) 16*1 16*1 *1: The number of inputs/outputs is fixed at 16 (16 bits), and only the lower 8 bits are valid. -72No.EX-OMZ0016-C EX600-W Series Unit name Model Unit product no.

Flow Controller for Water, FLOW CONTROLLER FOR WATER, Q54, 0.73000 lb

FLOW CONTROLLER FOR WATER. Flow Controller for Water. 0.68000 lb. Q54.