Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

G49-2-l02MS-X3 Round type Note 2) 0.2 MPa G49-7-l01MS-X3 G49-7-l02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Table of Contents

Model Description AC10B G27-10-R1 G27-10-R1 (3) AD17 Y100 AC25B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC30B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC40B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40B-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC50B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC55B G46-10-02 GC3-10AS G46-2-02 GC3-2AS

ZP

Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across flat 7 KJH02-M5 [Weight

ZP

Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across flat 7 KJH02-M5 [Weight

ZP

(JB/JF)25-01 ZPB-X3(JB/JF)50-01 ZPB-X3(JB/JF)75-01 ZPB-X3(JB/JF)100-01 13 7 40 4 4 x M5 x 0.8 1/8 (Rc, NPT, NPTF) 70 With four M5 bolts 83 Vacuum Equipment Precautions 1 Be sure to read this before handling.

Table of Contents

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

2

v Note 7) v Note 7) v Note 7) v Note 7) v Note 7) Note 1) Option is not assembled and supplied loose at the time of shipment.

Table of Contents

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Air Fittings & Tubing

F (mm) Port B min. port size Weight (g) L2 L3 L4 L5 L6 P Q1 Q2 M L1 89 110 99 125 108 139 40 KM12-04-02-6 6 17 65 72 81 91 97 112 1 4 10 18 29.5 19.5 29 10.6 16 6 12 4 61.5 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 47 1 4 17 10 19.5 31.5 21.5 31 13 17 7.5 13.5 6 73 55 3 8 19 11.5 22.5 35.5 24 34.5 15.5 18.5 9 14.7 8 86 SKM, #7 to #12 KM13 Tube O.D.

Compact 5-Port Solenoid Valve

PROFINET 3A M12 connector (4-pin, Socket, D-coded): 2 pcs. 7/8 inch connector (5-pin, Plug): 1 pc. 7/8 inch connector (5-pin, Socket): 1 pc.

CATALOG

8 ASV310F-02 PT1/4 7 8 ASV410F-01 PT1/8 13.5 14 ASV410F-02 PT1/4 13.5 14 ASV410F-03 PT3/8 13.5 14 ASV510F-02 PT1/4 23 27 ASV510F-03 PT3/8 27 29 ASV510F-04 PT1/2 27 29 Model Applicable T H D1 D2 L1 L2 L3 L4 *A M1 Weight g H O W T O O R D E R S E R I E S (N)ASV Tube OD Max Min Max Min ASV120F-M3-04 4 M3x0.5 5.5 9.5 7 21.5 25 9.8 28.6 26.1 25.8 23.3 13 5 ASV220F-M5-04 4 M5x0.8

F

-02 M14x1 17 17 31.5 15 15 17 13.1 3/8 3/8 KQE11-36 1/8-14 25.4 25.4 35.5 14.5 23 21 7 6 38 KQE06-03 M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38

I

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l

3M/SMseries

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

ZP

Width across flat 7 Width across flat 7 3 3 1.8 1.8 5.2 1.8 2.2 4 3.4 8 4.5 6 9 7 Vacuum Inlet Dimensions ZP3-T04B;-A10-U4 ZP3-T06B;-A10-U4 ZP3-T08B;-A10-U4 ZP3-T04B;-A10-U2 ZP3-T06B;-A10-U2 ZP3-T08B;-A10-U2 ZP3-T04B;-A10-02 ZP3-T06B;-A10-02 ZP3-T08B;-A10-02 1.8 One-touch fitting 0.9 Barb fitting Width across flat 7 Width across flat 7 (8.7) (8.5) (6.5) Width across flat 7 KJH02-M5 [Weight

VM

One way roller lever VFM350-02-02 VFM350-02-02S 14 polyacetal or head steel roller JIS Symbol (Pilot exhaust port) 0.5 MPa supply 2.4 mm P.T. 7 N F.O.F. 2-4.2 mounting hole 4.6 mm O.T.

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of