HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

HRX-OM-W060

fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump Capacity 8-9 HRX-OM-W060

Cooling Capacity: CH1: 19 kW; CH2: 1 kW, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: CH2 w/Electric Conductivity Control, Pump Option: 20 L/min, CH2 Optical Head

Cooling Capacity: 200 (CH1: 19 kW; CH2: 1 kW), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: CH2 w/Electric Conductivity Control, Pump Option: T2 (20 L/min, CH2 Optical Head)

ZP

ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 Adapter assembly part no.

ZP

ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 Adapter assembly part no.

2

(C) Correction factor 1.25 1.11 1 0.90 0.63 2 to 25 30 32 35 40 2 to 25 30 32 35 40 45 2 to 25 30 32 35 40 2 to 25 30 32 35 40 2 to 25 30 32 35 40 Note) For the water-cooled type, the correction factor is determined to 1 in an ambient temperature range of 2 to 45C.

Electric Actuator/Slider Type

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.

Battery-less

As the connector cover dimensions are different, take the dimensions below into consideration during the design process. 40 40 65 24 40 40 40 24 An air cylinder with an auto switch cannot be installed in the shaded area. Battery-less absolute encoder connector cover dimensions 181 CE/UL-compliance List For CE/UL-compliant products, refer to the tables below and the following pages.

ZP

ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 Adapter assembly part no.

15

14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50 36* 4.5* 40.1 69.8 61.4 M4

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Do not apply strong impact or an excessive moment while mounting the product or a workpiece. LEC SS-T LEC Y LEC Y If an external force over the allowable moment is applied, it may cause play in the guide or an increase in the sliding resistance. 3.

ZP

, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P. 73 Adapter Assembly Part No.

Cooling Capacity: CH1: 19 kW; CH2: 1 kW, Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: -

Cooling Capacity: 200 (CH1: 19 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control)

Cooling Capacity: 200 (CH1: 19 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: T2 (20 L/min, CH2 Optical Head)

Table of Contents

(Refer to page 13-2-40 for How to Order.) Combination Symbol: K2 Combination Symbol: K7 An N.C. solenoid valve is used as the supply valve. Also, an external 2 port valve (vacuum valve) must be provided to serve as the vacuum release valve. An air operated N.O. valve is used as the supply valve. An N.C. solenoid valve is used for the vacuum release valve.

Integrated Controller

Motor Maintain a space of 40 mm or more. e-Actuator rod type built-in magnet portion (Piston) 40 40 40 Maintain a space of 40 mm or more. 40 40 e-Actuator slider type built-in magnet portion (Table unit) An air cylinder with an auto switch cannot be installed in the shaded area. 63 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.