HRX-OM-Y098

20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity

HRX-OM-W060

Sound noise:HRL100-A-20 : 75 dB(A) HRL200-A-20 : 75 dB(A) HRL300-A-20 : 71 dB(A) * Front 1m, height 1m, rated condition 3.2 Installation HRL Series 3-6 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.2.3 Installation and maintenance space It is recommended to keep the space around the product shown in Fig. 3-3.

Cooling Capacity: CH1: 26 kW; CH2: 1 kW, Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: CH2 w/Electric Conductivity Control, Pump Option: 20 L/min, CH2 Optical Head

Cooling Capacity: 300 (CH1: 26 kW; CH2: 1 kW), Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: CH2 w/Electric Conductivity Control, Pump Option: T2 (20 L/min, CH2 Optical Head)

Thermo-chiller

30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW(kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

Cooling Capacity: CH1: 26 kW; CH2: 1 kW, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: -, Pump Option: -

Cooling Capacity: 300 (CH1: 26 kW; CH2: 1 kW), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)]

ZP

Bushing 9 9 35 (B) M18 x 1.5 5 Dimensions Model 40 75 111 A 107 142 178 B 11.5 4 x M4 x 0.7 3 ZPB-T2(JB/JF)25-01 ZPB-T2(JB/JF)50-01 ZPB-T2(JB/JF)75-01 34 45 With four M4 bolts Applicable pad part no.

ZP

Bushing 9 9 35 (B) M18 x 1.5 5 Dimensions Model 40 75 111 A 107 142 178 B 11.5 4 x M4 x 0.7 3 ZPB-T2(JB/JF)25-01 ZPB-T2(JB/JF)50-01 ZPB-T2(JB/JF)75-01 34 45 With four M4 bolts Applicable pad part no.

2

AFD20-A) and NPT1/4 (applicable to the AFM30-A/40-A, AFD30-A/40-A).

Battery-less

35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE Lead A B C A B C A B C A B C Ambient

Electric Actuator/Slider Type

LEY25 B 40 20 Lead 12: LEY25 A Lead 12: LEY25 A 20 10 0 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEY32 V7 (Motor mounting position: Top/Parallel) Vertical Horizontal 50 80 Lead 5: LEY32 C Lead 5: LEY32 C 40 60 Lead 10: LEY32 B Regenerative resistor area Work load [kg] Work load [kg] 30 Lead 10: LEY32 B 40 Lead 20: LEY32 A 20 Lead 20: LEY32 A 20 10

ZP

Bushing 9 9 35 (B) M18 x 1.5 5 Dimensions Model 40 75 111 A 107 142 178 B 11.5 4 x M4 x 0.7 3 ZPB-T2(JB/JF)25-01 ZPB-T2(JB/JF)50-01 ZPB-T2(JB/JF)75-01 34 45 With four M4 bolts Applicable pad part no.

Environment

LEF How to Order LEJ LEL S2 25A-LEJS 40 500 A H LEM Series compatible with secondary batteries w e r q t y u i o !

15

mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 1.0 12 80 18 30 95 6.8 40 25 20 to 35 40 28.5 75 64 5 6 60 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 M6 x 1.0 12 95 28 40 117 7.3 60 32 Size Stroke range [mm] Without lock With lock A VB VC A VB VC 25 15 to 100 255.5 82.5 11.5 300.5 127.5 11.5 105 to 300 280.5 325.5 32 15 to 100 266.5 80 14 306.5 120 14 105 to 300 296.5 336.5 757 LEYG Series AC Servo Motor

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Integrated Controller

Motor Maintain a space of 40 mm or more. e-Actuator rod type built-in magnet portion (Piston) 40 40 40 Maintain a space of 40 mm or more. 40 40 e-Actuator slider type built-in magnet portion (Table unit) An air cylinder with an auto switch cannot be installed in the shaded area. 63 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Table of Contents

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

Vacuum Pad

Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3.6 [dm3/(sbar)].