Air Cylinder

orifice P G F H2 D I B LH 2 x LC 4 x LD Width across flats B2 MM Width across flats NA LT Y X S + Stroke Z + Stroke X Y Width across flats KA LX LZ LS + Stroke ZZ + 2 x Stroke (mm) Bore size A AL B B1 B2 D F G H H1 H2 I K KA LC LD LH LT LX LZ MM NA P X Y Z 20 18 15.5 40 13 26 8 13 8 41 5 8 28 5 6 4 6.8 25 3.2 40 55 M8 x 1.25 24 1/8 20 8 21 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) (Effective thread length 2 x FL) MM 2 x LC LZ LX D D I 20, 25 Width across flats KA Standard port Width across flats NA MM Relief port (10-, 21-) Vacuum port (11-, 22-) 45 45 Width across flats B2 LT 4 x LD Y ZZ + 2 x Stroke LS + Stroke S + Stroke X Z + Stroke Z X Y 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P I F A 12 10 8 6 KA MM NA NN B1 B2 G 4 4 4 4

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water)

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: -, Option: -

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

Table of Contents

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

reduced facilities investment, space saved facility water facilities, and reduced running cost.Circulating fluids type: fluorinated, ethylene glycol aqueous solution, and clean/DI water, Temperature range setting: 20 to 90 °C, Cooling capacity: 2 kW, 8 kW, 15 kW, and 30 kW, Temperature stability: ±0.3 °C, Ideal for ordinary temperature and high temperature processes, Front Panel for HRW008

2

L, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Proposals for Energy Saving

S L, Z Thread AC Flange DC Note) Surge voltage suppressor is attached to the lead wire.

Made to Order

Packing set (8) w-1 From P. 23 Pin cylinder Double acting, Single rod CJP2 CJ2-Z CJ2W-Z CM2-Z CM2W-Z CM2K-Z CM2KW-Z CM2R-Z CM2RK-Z CBM2 CG1-Z CG1W-Z CG1R-Z MB-Z MBW-Z MB1-Z MB1W-Z CA2-Z CA2W-Z CBA2 CS1N CS1WN CS2 CS2W CUJ CU CUK CU CUK CQS CQSW CQ2-Z CQ2W-Z CQP2 CQ2K-Z CQ2KW-Z CG5 CY3B MK-Z MGPM-Z MGQ MGG MGC CXSJ CXS Except with air cushion and auto switch, rod end bracket T, U Except with

XL

heater for 100C (212F) H2 XLA With heater for 120C (248F) H3 Note) Auto switches cannot be mounted in the case of high temperature types. 4 Normally Closed/Bellows Seal Series XLAV Air Operated Type/With Solenoid Valve How to Order XLAV 16 FF9N 1 G Light/Surge voltage suppressor High vacuum angle valve None With surge voltage suppressor With light/surge voltage suppressor Nil S Z Normally

CM2

S ZZ Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z + Stroke ZZ +

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm) 20 25 32 40 Symbol S ZZ Z S ZZ Z S ZZ Z S Z ZZ S Z ZZ 20 25 32 40 14 65.3 19.8 217 208 137 192 183 112 167 158 87 14 70.5 22 221 212 137 196 187 112

High Vacuum Angle Valve, XL Series

heater for 100C (212F) H2 XLA With heater for 120C (248F) H3 Note) Auto switches cannot be mounted in the case of high temperature types. 4 Normally Closed/Bellows Seal Series XLAV Air Operated Type/With Solenoid Valve How to Order XLAV 16 FF9N 1 G Light/Surge voltage suppressor High vacuum angle valve None With surge voltage suppressor With light/surge voltage suppressor Nil S Z Normally

5

RHC With Rod Trunnion With Head Trunnion RZQ Z + Stroke TX CD Z + Stroke TX CD 51 40 3.2 3.2 40 51 6.8 x 3.4 6.8 20.5 7.5 40 57 6.8 20.5 LX LZ LX LZ 7.5 40 57 6.8 x 3.4 (mm) Mounting Part no.

REC

27 264 4.9-10 Sine Cylinder Series REC REC F/Front flange H2 2-Rc(PT)P Width across flatsB2 2-NN G G I H1 Width across flatsB1 Relieving port M5 X 0.8 Standard port Relieving port MK/MK2 2-Eh8 FY D B RSQ/RSG MM AL 4-7 lNA FT RSH K A FX FZ Mounting hole F N N Z CE1 S+Stroke H 40 ZZ+Stroke CE2 Standard port ML2B Relieving port ML1C (mm) 2-7 FT FX FY FZ B1 D A AL B B2 F G H E Bore size Stroke

REC

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

Hydraulic

Z (Example) C73CZ None .