Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Y+Z

The HRW series thermo-chiller is a high-performance device for circulating a fluid at a constant temperature (Water-cooled type).? Energy saving is substantially increased by exchanging cooling water and heat directly.? The HRW can achieve reduction in power consumption as it does not have a compressor, and reduction in the amount of facility water used because heat is exchanged directly

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Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

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No. q w e r t y u i o !

Air Cylinder

orifice P G F H2 D I B LH 2 x LC 4 x LD Width across flats B2 MM Width across flats NA LT Y X S + Stroke Z + Stroke X Y Width across flats KA LX LZ LS + Stroke ZZ + 2 x Stroke (mm) Bore size A AL B B1 B2 D F G H H1 H2 I K KA LC LD LH LT LX LZ MM NA P X Y Z 20 18 15.5 40 13 26 8 13 8 41 5 8 28 5 6 4 6.8 25 3.2 40 55 M8 x 1.25 24 1/8 20 8 21 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4

KJ

No. q w e r t y u i o !

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

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5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

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51 +0.2 0 420.1 Plug side 2 x 6 4 x M4 or 4.5 (For mounting) L3 L4 Tubing O.D.: 12 Y Y1 245.50.1 238.5 +0.2 0 4.5 3.5 8 4 3 2 1 5 6 7 9 10 H1 H2 H3 54 +0.2 0 450.1 20 19 18 17 16 15 14 13 12 11 Y Y1 4 x 4.5 Fittings Plug side 2 x 6 4 x M4 or 4.5 (For mounting) Panel mounting hole Model A B C L1 L2 L3 L4 H1 H2 H3 KDM20-10-X1053 29 24.7 8 209 21 225 216 54.5 42 24 KDM20-12-X1053 25.5 31.7

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) G F MM 2 x LC LZ LX D I 4 x LD 20, 25 Width across flats KA Width across flats B2 Width across flats NA Standard port LT 45 ZZ + Stroke LS + Stroke S + Stroke X Y X Y Z Relief port (10-, 21-) Vacuum port (11-, 22-) 32, 40 (mm) H H2 H1 S P I G D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K 54 47 47 40 B LH LT LS LX LD 8 13 AL

SMC Pneumatic Clean Series

MM LX 2-LC D I LZ 4-LD 20, 25 Width across flats B2 Width across flats NA Standard port LT 45 N N Relief port Y X Y S + Stroke X Z LS + Stroke ZZ + Stroke 32, 40 (mm) 54 47 47 40 B LH LT LS LX LD 8 13 AL F K MM NA NN B1 B2 Bore size H H2 H1 S P N I G D A ZZ 6.8 4 LC LZ X Y Z 8 8 8 42.5 34.5 30 24 1/8 46.5 37.5 33.5 28 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 88 64 62 62 40 32 25 20 24 22

Smooth Cylinder/Low Speed Cylinder

L1 1273-1 A Series CQ2X Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface material: Nickel plated Material: Cast iron Surface material: Nickel plated Material: Carbon steel

Proposals for Energy Saving

1 r t y !2 e !4 !5 !4 !5 !

Made to Order

Applicable rod end nut A L1 H1 H A L1 H1 H2 H I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 125 140 160 NT-12 NT-12 NT-16 110 50 3.5 100 156.5 125 65 100 181 18 110 50 3.5 105 161.5 125 65 105 186 18 120 56 3.5 110 170.5 140 76 110 198 21 Symbol -XC87 Cylinder with

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2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

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L1 D-X 243 CQ2Y Series Dimensions of Accessories Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface treatment: Nickel plating Material: Cast iron Surface treatment: Nickel plating (mm) Material: Carbon

CM2

CA2 ND hole H10 Axis d9 CS1 C76 C85 C95 MM A H L NX2 ND U2 Y Z R2 Bore size (mm) 20 25, 32 40 +0.2 +0.1 9 18 41 25 M8 x 1.25 9 10 14 11 66 CP95 +0.2 +0.1 9 22 45 25 M10 x 1.25 9 10 14 14 69 +0.3 +0.1 16 24 50 49.7 M14 x 1.5 12 13 25 13 92 NCM Double Knuckle Joint NCA Y-020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron D-X ND hole H10 Axis d9 ND hole H10 Axis d9 20Data Applicable

Prevents Micro-Bubbles

Dimensions LLHAStations 4-Mounting hole for W Y K A D L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 E 3/8 U 2-P port Pitch = B n-A port (mm) Dimensions (mm) B C D E G H1 H2 K N U V W Y A Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19 125.5 127.5