Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting

2

)-A 03-A Y510-(02)-A 03-A Y610-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A

CATALOG

10 18 -0.5 ~ -03 30 12 14 I-G04 14 22 42 M14x1.5 32, 40 41.6 IY-G04 30 12 14 Y-G04 36 16 22 42 M14x1.5 32, 40 0~0.070 0~0.070 14 22 -0.5 ~ -03 14 22 -0.5 ~ -03 40 16 20 I-G05 18 28 56 M18x1.5 50, 63 50.6 IY-G05 40 16 20 Y-G05 44 20 28 56 M18x1.5 50, 63 0~0.070 0~0.070 18 28 -0.5 ~ -03 18 28 -0.5 ~ -03 50 21 27 I-G08 21 38 71 M22x1.5 80 64 IY-G08 50 21 27 Y-G08 56 23 38 71 M22x1.5 80 0~0.084

1

C C q: SY30M-56-4A w: SY50M-56-4A e: SY70M-56-4A D Individual EXH (SUP) spacer assembly D Mounting onto a manifold follows the order explained above.

Table of Contents

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

A

10 18 -0.5 ~ -03 30 12 14 I-G04 14 22 42 M14x1.5 32, 40 41.6 IY-G04 30 12 14 Y-G04 36 16 22 42 M14x1.5 32, 40 0~0.070 0~0.070 14 22 -0.5 ~ -03 14 22 -0.5 ~ -03 40 16 20 I-G05 18 28 56 M18x1.5 50, 63 50.6 IY-G05 40 16 20 Y-G05 44 20 28 56 M18x1.5 50, 63 0~0.070 0~0.070 18 28 -0.5 ~ -03 18 28 -0.5 ~ -03 50 21 27 I-G08 21 38 71 M22x1.5 80 64 IY-G08 50 21 27 Y-G08 56 23 38 71 M22x1.5 80 0~0.084

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Table of Contents

Part No. 02 03 02 03 Note Platinum silver Platinum silver Black Black No.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 SY9140-04 Tubing bore x Length Speed controller Silencer 102 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz

Table of Contents

DY08-01 18 44 32 8 14 DY08-02 16 21 51 14 12 24.5 DY08-03 22 69 26.5 56 10 17 DY10-02 23 70 14 26.5 DY10-03 17 22 77 Connection thread DY10-04 27 28.5 116 DY12-02 25 106 17 62 12 19 DY12-03 17 28.5 26 112 DY12-04 27 17 Bulkhead Union: DE H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

SY

(Refer to page 56 for details.)

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

5

01 03 50 12 Part no.

Table of Contents

21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL

KJ

DY08-01 18 44 32 8 14 DY08-02 16 21 51 14 12 24.5 DY08-03 22 69 26.5 56 10 17 DY10-02 23 70 14 26.5 DY10-03 17 22 77 Connection thread DY10-04 27 28.5 116 DY12-02 25 106 17 62 12 19 DY12-03 17 28.5 26 112 DY12-04 27 17 Bulkhead Union: DE H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Proposals for Energy Saving

Note 4) -01, -02, -03,-06 at the end of the part number indicates the port size. (01: 1/8, 02: 1/4, 03: 3/8, 04: 1/2, 06: 3/4) Note 5) The pressure gauge for AW1000-M5G-1 will be G27-10-R1 for 1.0MPa.

Table of Contents

AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650

AC

For AC2040 For AC3040 For AC4040 For AC4040-06 Model Description 02 03 04 06 E50-06 E3002 03 04 E2001 02 03 E40Piping adapter Attachment Accessory 4 4 4 06 4 VHS201 02 02 03 VHS3000VHS402 03 04 Y24-01 02 02 Y34-01 Y44-02 03 Y54-03 04 02 03 04 2 2 2 Y IS1000E02 03 04 3 3 3 Y IS1000EIS1000EY 01 02 03 Pressure switch with piping adapter Residual pressure exhaust 3 port valve Cross interface

V100

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

CQ2

A type mounting bracket part No.YA-03 Joint YU-03 Joint Part No. Applicable mounting bracket Bore size (mm) Weight (g) Joint part No. B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No.