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3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 18 Dimensions p. 20 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series IP65 2 outputs ZSE/ISE20B p. 13 IP65 2 outputs ZSE/ISE20C p. 24 IO-Link IP65 1 output ZSE/ISE20B-L p. 15 Air General fluids For vacuum pressure For compound pressure For positive pressure

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

ZSE30A(F)/ISE30A

A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min. B Released Work 1 Work 2 Work n D Peak/Bottom value indication Atmosphere This function constantly detects and updates the maximum (minimum) value and allows to hold the maximum (minimum) pressure value.

ZSE20(F)_ISE20

B Panel mount adapter Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no. Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

ZISE20.eng

ISE20 : 0.500 MPa ZSE20 : -50.5 kPa ZSE20F: 50.0 kPa Bracket B Pressure Setting Default setting Units specification Pressure range ISE20 ISE20 : 0.050 MPa ZSE20 : 5.1 kPa ZSE20F: 5.0 kPa Safety Instructions MPa Mounting with panel mount adapter Mount part (a) to the front of the body and fix it.

Nozzle Type Ionizer

Parts p. 12 Options p. 13 Functions p. 14 Wiring p. 15 Power Supply Cable Connection Circuit p. 16 High flow rate nozzle Timing Chart p. 16 Dimensions p. 17 Related Product Intermittent Control Timer p. 20 Made to Order With Right Angles -X367 p. 21 Nozzle Variations p. 23 Female threads for piping Specific Product Precautions p. 24 Safety Instructions Back Cover 7 IZN10E Series

ZP

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

ZP

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

ZP

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

ZP

R 30 (Rotating angle) 40, 50 Construction p. 120 Buffer Assembly p. 130 66 A Basic Pad Bellows Type ZP Series How to Order Dimensions/ Models Construction Mounting Bracket Assembly ZP 06 B N p. 68 p. 115 p. 117 From p. 121 Pad unit ZP T 06 B N A5 From p. 69 p. 115 p. 117 From p. 121 With adapter ZP T 06 B N J 6 B3 A8 From p. 79 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Bellows

Mechanical Valves Series NVM, NVFM, NVZNI

P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s

IIIIIII

P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Specifications Model ISE35 Rated pressure range 0 to 1 MPa Display/setting pressure range 0.1 to 1 MPa ZSE20 ISE20 Withstand pressure 1.5 MPa ZSE30 ISE30 Minimum display/setting unit 0.01 MPa Applicable fluid Air, Non-corrosive gas, Non-flammable gas ZSE40 ISE40 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) Power supply voltage ZSE10 ISE10 Current consumption

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T