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3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 18 Dimensions p. 20 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series IP65 2 outputs ZSE/ISE20B p. 13 IP65 2 outputs ZSE/ISE20C p. 24 IO-Link IP65 1 output ZSE/ISE20B-L p. 15 Air General fluids For vacuum pressure For compound pressure For positive pressure For vacuum pressure For compound

Digital Pressure Switch ( compatible)

IODD file 1 1 ISE20B-L(-M)SMC-ISE20B-L-ymmdd-IODD1.1 2 ISE20B-L-PSMC-ISE20B-L-P-ymmdd-IODD1.1 3 ZSE20B-L(-M)SMC-ZSE20B-L-ymmdd-IODD1.1 4 ZSE20B-L-PSMC-ZSE20B-L-P-ymmdd-IODD1.1 5 ZSE20BF-L(-M)SMC-ZSE20BF-L-ymmdd-IODD1.1 6 ZSE20BF-L-PSMC-ZSE20BF-L-P-ymmdd-IODD1.1 1: "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

PSxx-OMU0005CN

B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

Fieldbus system EtherNet/IP compatible SI Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

ZISE20B.eng

MPa ISE20B ISE20B: 0.050 MPa/ZSE20B: 5.1 kPa/ ZSE20BF: 5.0 kPa "Nil" or M Hysteresis kPa ZSE20B(F) Safety Instructions Bracket A ISE20B Delay time 1.5 ms or less Bracket B psi P ZSE20B(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. 5 6 P EXH V V V PE Circuit ZQ11U-K1D F DK Type J1 ZQ11U-J1With L type plug connector Suction filter Vacuum pressure switch Supply valve Bracket A (standard) Pilot exhaust port (PE port) Note 4) 2-3.2 through Body mounting hole Note 2) S R U N L H L H k P a MODE SE T H YS Air supply port (P port) Note 4) (M3 x 0.5

1

P.T. 5.5 25 (L) (A) 3 port (A) 2 12 10 1 (P) 3 (R) 14.5 14.5 2 x 1/8 17 44 25.4 2 x 4.6 mounting hole * 0.5 MPa supply Model L A VM120-01-00A 32.5 7.5 F.O.F.* 26 N VM130-01-00A P .T. 1.5 mm VM121-01-00A 28.5 3.5 O.T. 1.5 mm VM131-01-00A T.T. 3 mm Roller lever VM121-01-01A VM131-01-01A VM121-01-01SA VM131-01-01SA Symbol 2 port 10 Polyacetal or hard steel roller (A) 2 12 10 1 (P) 29.2 45.5

E-P HYREG ® Series VY1

G NPT NPTF Command signal DC Power source/Command signal Symbol Power source voltage DC Nil 0 to 10 V 1 to 5 V 1 24 V 2 3 5 6 7 8 4 to 20 mA 0 to 20 mA 1 to 5 V 0 to 10 V 4 to 20 mA 0 to 20 mA 12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate

13

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

CG5-S

R V Basic type (B)/CG5BAS : With air cushion WA WB GA GB 2-P W 10 H1 Width across flats B1 M BM Max.

NCG/CG1

2-wire Diagnostic indication (2-color indication) Grommet B59W G59 G5P K59 G59W G5PW K59W G5BA G59F M9N M9P M9B M9NW M9PW M9BW M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 12 V Grommet 24 V Relay, PLC IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 2-wire Water resistant (2-color indication) Diagnostic output (2-color indication

CNG

500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) 1000 1000 Maximum speed: V (mm/s) 9-5-7 Cylinder with Lock Double Acting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

wire 24 V Connector Diagnostic indication (2-color indication) 20B59W Grommet H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 G59W G5PW K59W 3-wire (NPN) 3-wire (PNP) IC circuit Data 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V 24 V 12 V Grommet 2-wire Water resistant (2-color indication)

Air Cylinder

) Note 13) v v v v v XC9 Note 15) Note 14) Note 14) v v v v v v v XC10 v v v v v v v XC11 v v v v v XC12 v v v v XC13 v v v v XC20 Note 15) v v v XC22 Note 2) v v v v v v XC27 v v v v v v v XC29 v v v v XC35 v v v v v v v XC37 v v v v v XC42 v v v XC85 X446 Note 8) Copper-free for the externally exposed part.