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: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 18 Dimensions p. 20 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series IP65 2 outputs ZSE/ISE20B p. 13 IP65 2 outputs ZSE/ISE20C p. 24 IO-Link IP65 1 output ZSE/ISE20B-L p. 15 Air General fluids For vacuum pressure For compound pressure For positive pressure For vacuum pressure For compound

B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

MPa ISE20B ISE20B: 0.050 MPa/ZSE20B: 5.1 kPa/ ZSE20BF: 5.0 kPa "Nil" or M Hysteresis kPa ZSE20B(F) Safety Instructions Bracket A ISE20B Delay time 1.5 ms or less Bracket B psi P ZSE20B(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Units specification Pressure range Default setting ISE20B: 0.050 MPa/ZSE20B: 5.0 kPa/ ZSE20BF: 5.0 kPa Hysteresis ISE20B MPa "Nil" or M ZSE20B(F) kPa Delay time 0.00 sec.

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option.

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Example) IS10M-30-6LP Symbol Description Nq Body size 20 30 40 50 a Set pressure range Nil 0.1 to 0.4 MPa V V V V 6 Note 1) 0.1 to 0.6 MPa V V V V + Semi-standard Nil 0.5 m V V V V L 3 m V V V V Z 5 m V V V V + b Lead wire length Nw 23 15 (13) c Pressure unit of the scale plate Nil MPa V V V V P Note 2) MPa/psi dual scale V V V V (23) (5000) (3000) (500) Note 1) Set pressure range of 6P (

I S T O N R O D C L E V I S GKM: S T E E L, Z I N C C H R O M AT E P L AT E D Cyl.

-'l I lgh pr;iirr" lype, 15W coil I I at"hirg ly,pe I ),t.rra o tor. lW coil I o\,, walr rype 0 5W;o I a a ' t I o " o o c i o d o u b l e ' o l F n o ' o o v d a I 6 B v o n d o o l p d . " o I ' o' 1 .'|o-c I Coil voltages EtrT 'Consull SMC for available volages.