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3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

13 Specifications p. 14 3-Screen Display High-Precision Digital Pressure Switch for General Fluids ZSE20C(F)/ISE20C(H) Series How to Order p. 24 Specifications p. 25 Set Pressure Range and Rated Pressure Range p. 26 Analog Output p. 26 Functions p. 26 Internal Circuits and Wiring Examples p. 27 Dimensions p. 28 3-Screen Display High-Precision Digital Pressure Switch/ IO-Link Compatible ZSE20B

PSxx-OMU0008CN

X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

A

I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS ON THIS

Thermo-chiller/Rack Mount Type

) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 wParticle Filter Element for Replacement p. 36 Specifications eDI Filter Replacement Cartridge p. 36 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 15 rAnti-quake Bracket p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 16 tPiping Conversion Fitting (For

Thermo-chiller

for Lasers Water-cooled refrigeration Air-cooled refrigeration Thermo-chiller HRLE Series How to Order/Specifications Air-cooled refrigeration . p. 9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17

Compact Vacuum Ejector Series ZQ

for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

IIIIIIIIII

I Introduction Table of Contents The S-5200 and S-5300 Series are designed for applications requiring precise sequencing of pneumatic control circuits. Sequencing and deadband characteristics can be tuned by varying the output restriction.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

(a) (b) Actuator effective torque S . Ta (S is 10 times or more) Allowable moment (Nm) Allowable thrust load (N) .

ZISE20C.eng

Bracket C MPa ISE20C(H) ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa "Nil" or M Hysteresis Self tapping screws: Nominal size 3 x 8L kPa ZSE20C(F) Self tapping screws: Nominal size 3 x 10L Safety Instructions Bracket A ISE20C(H) Delay time 1.5 ms or less psi P ZSE20C(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended

ZISE20C-L.eng

Safety Instructions Bracket A ISE20C(H) Display color Output ON: Green/Output OFF: Red (Linked to OUT1) P psi ZSE20C(F) : Arbitrary display OUT1 hysteresis OUT1 set value Mode display These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Series KV2 Fittings

S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S B R G BU W Y YR N S PU BR GD GR T Black Red Green Blue White Yellow Orange Natural Silver Purple Brown Dk.

Air Cylinder

Technical Data 305 CG1 Series Clevis: CG1DN (20 to 63) S + Stroke MM AL A H GA GB L RR F K C CZ TT 2 x P (Rc, NPT, G) CDH10 (Hole dia.) d9 (Shaft dia.)

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .