SMC Corporation of America
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Rated Pressure Range: -0.1 to 1 MPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: E (Panel Mount Adapter)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 117 lb

13 Specifications p. 14 3-Screen Display High-Precision Digital Pressure Switch for General Fluids ZSE20C(F)/ISE20C(H) Series How to Order p. 24 Specifications p. 25 Set Pressure Range and Rated Pressure Range p. 26 Analog Output p. 26 Functions p. 26 Internal Circuits and Wiring Examples p. 27 Dimensions p. 28 3-Screen Display High-Precision Digital Pressure Switch/ IO-Link Compatible ZSE20B

(-M): 0 ISE20C-L-P: 4 ZSE20C-L(-M): 1 ZSE20C-L-P: 4 ZSE20CF-L(-M): 1 Unit (Selection of display unit) 0x03E8 (1000) 0 R/W Y U8 ZSE20CF-L-P: 4 ISE20CH-L(-M): 0 ISE20CH-L-P: 4 NorP (Selection of PNP/NPN) Setting of switch output specification 0: NPN 1: PNP 0x03E9 (1001) 0 R/W Y U8 0x01 (1) Setting of display color 0: red (Constantly red) 1: Grn (Constantly green) 2: 1SoG CoL (Selection of display

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

X M 2 3 ISE20C -0.100~1.000 MPa Y ZSE20C 0.0~-101.0 kPa K ZSE20CF -100.0~100.0 kPa T ISE20CH -0.100~2.000 MPa 24 X NPN2 A1 A Y PNP2 A3 C R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E

Pressure Characteristics 3 5%F.S. (0 to 0.75 MPa, 0.35 MPa standard) Power supply voltage 12 to 24VDC 10% Ripple (p-p) 10% or less Electrical Current consumption 55 mA or less Protection Polarity protection Display accuracy 3%F.S. Analogue output accuracy 3%F.S.

() C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () (3.02 ) ZS-

V: Power supply voltage Power consumption P: 1000 [W] Q = P = 1000 [W] P Cooling capacity = Considering a safety factor of 20%, Power consumption 1000 [W] x 1.2 = 1200 [W] e Derive the heat generation amount from the output. w Derive the heat generation amount from the power supply output. Output (shaft power, etc.)

CH2 Circulating fluid return port Set control range: 0.5 to 45.0 S/cm CH2 Circulating fluid outlet DI filter CH1 Circulating fluid outlet w qe Particle filter set p. 22 Step q Press the key. Removes foreign matter in the circulating fluid Step w Adjust the temperature setting with the / keys.

Internal circuit and wiring example Z/ISE80Output specification -N NPN open collector output type Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector output type Max. 80 mA Residual voltage 1 V or less -S/-R (Analogue output mode) Switch output NPN open collector output type 2 output Max. 28 V, 8 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) None Nil 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

PNP Max.80 mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

Bracket C MPa ISE20C(H) ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa "Nil" or M Hysteresis Self tapping screws: Nominal size 3 x 8L kPa ZSE20C(F) Self tapping screws: Nominal size 3 x 10L Safety Instructions Bracket A ISE20C(H) Delay time 1.5 ms or less psi P ZSE20C(F) Display color OUT1 ON: Green/OUT1 OFF: Red : Arbitrary display These safety instructions are intended

Safety Instructions Bracket A ISE20C(H) Display color Output ON: Green/Output OFF: Red (Linked to OUT1) P psi ZSE20C(F) : Arbitrary display OUT1 hysteresis OUT1 set value Mode display These safety instructions are intended to prevent hazardous situations and/or equipment damage.