3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

.S.

PSxx-OMU0008CN

5 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4

180

3 <10> wy!1!4 Piston assembly MHY-A1003 MHY-A1603 MHY-A2003 MHY-A2503 <16, 20, 25> wy!1!4!6 Order 1 piece of finger assembly per one unit.

High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation

Rated Pressure Range: -0.1 to 2 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual, w/

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Table of Contents

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

2

INDEX 166 Series AF10-A to AF60-A Dimensions AF10-A/AF20-A AF50-A/AF60-A D U M J N T Bracket (Option) S Bracket (Option) R R B C V Q OUT IN J M U S N T 2 x P (Port size) D R V Q B C IN OUT Clearance for maintenance G Drain A AF30-A to AF40-06-A N T J M 2 x P (Port size) Bracket (Option) U D S V Q IN OUT B C 2 x P (Port size) Clearance for maintenance G Drain A E Clearance for maintenance

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4 (ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Plain Gray Orange PRESSURE SWITCH PRESSURE SWITCH PRESSURE SWITCH 719 2-Color Display Digital Pressure Switch For Air Series ISE70 How to Order ISE70 1 MPa 02 43 M Piping 02 N02 F02 Rc1/4 NPT1/4 G1/4 (ISO1179) Option 2 None Nil Output With bracket 2 settings NPN open collector 2 outputs ((Pin no.: 2, 4) 27 Fixed

ISE70/75/75H

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

Speed Controller: Standard Type Series AS In-line Type

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ O-ring NBR u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 O-ring NBR ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

PSxx-OMM0002CN

* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F LCD (UP) (SET) ) (DOWN) () LCD 4 (UP) ON/OFF (DOWN) ON/OFF (SET) -10No.PS-OMM0002CN-F

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Pressure Switch: For Air ISE70/71 Series How to Order p. 6 Options/Part Nos. p. 6 Specifications p. 7 Set Pressure Range and Rated Pressure Range p. 10 Internal Circuits and Wiring Examples p. 10 Dimensions p. 11 Function Details p. 12 Safety Instructions Back cover 5 RoHS 3-Screen Display High-Precision Digital Pressure Switch: For Air ISE70/71 Series How to Order ISE70 02 M L2 Pressure

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Cylinder extension speed: 100 mm/s Meter-out needle fully open 100 mm/s Return speed Solenoid valve (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended. Exhaust port (EA) Supply port (P) Exhaust port (EB) Fig.

MU

M MDU B 25 10 S M A73 S With auto switch Built-in magnet Number of auto switches Mounting S n 2 1 n B L F G C D Basic Axial foot Front flange Rear flange Single clevis Double clevis Without auto switch(built-in magnet) Auto Switch Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Plate Cylinder

M Z MU B 25 10 S S Z M M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

PSxx-OMV0003CN

IO-Link 1.0 IO-Link -81No.PS-OMV0003CN-G ISE70 ISE71 01.000 MPa 01.600 MPa / -0.1051.050 MPa -0.1051.680 MPa / 0.001 MPa 1.5MPa 2.4 MPa DC1224 V10(p-p)10 IO-Link DC1830 V (p-p)10 35 mA 2% F.S.1 digit(253 ) 0.5F.S. 2%F.S.(25 ) PNP NPN OFF 80 mA 30 V(NPN ) () 1.5 V (80 mA ) 1 1.5ms (060 s/0.01 ) 2 0 3 MPakPakgf/cm 2barpsi LCD 3 (X2) / 4 (7 ) 4 (1 11 7 ) ON OUT1OUT2