Nozzle Type Ionizer

Electrostatic sensor monitor Pressure switch Pressure switch Static neutralization completed Static neutralization completed Abnormal pressure detection Abnormal pressure detection Compressed air Compressed air Ionizer Ionizer Ionizer Ionizer Stop Stop Abnormal pressure occurrence Stop Abnormal pressure occurrence Stop Charged potential measurement Charged potential measurement ISE20 IZN10E IZN10E IZD10

Secondary Batteries

Sensor Electrostatic Sensor Series IZD10/IZE11 Handheld Electrostatic Meter Series IZH10 Monitor Series IZD/IZE Consult SMC about Material restriction. Explosion Proof Equipment 5 Intrinsically Safe Explosion-proof System 5 Port Solenoid Valve Series 51-SY Explosion Proof Solenoid Valve Series 50-VFE/VPE Series 51-SY Series 50-VFE/VPE Consult SMC about Material restriction.

The IZD10 is SMC's standalone electrostatic sensor. The sensor is a pre-wired assembly including sensor head, sensor amplifier, and cable with flying leads. It is intended to be paired with the IZE11 monitor for output reading.

The IZE11 is SMC's electrostatic sensor monitor, to be used with the IZD10 sensor. The monitor has a 2-color display and can be bracket or panel mounted. Outputs include 2 switches and 1 analog range. The monitor has multiple functions such as peak and bottom hold, as well as error diagnostics.

The IZE11 is SMC's electrostatic sensor monitor, to be used with the IZD10 sensor. The monitor has a 2-color display and can be bracket or panel mounted. Outputs include 2 switches and 1 analog range. The monitor has multiple functions such as peak and bottom hold, as well as error diagnostics.

The IZD10 is SMC's standalone electrostatic sensor. The sensor is a pre-wired assembly including sensor head, sensor amplifier, and cable with flying leads. It is intended to be paired with the IZE11 monitor for output reading.

1

158n + 510 0.18 3.5 0.23 3.2 C10 3/8 SS5Y7-51 (Bottom ported) 150n + 549 172n + 549 0.16 4.0 0.25 3.5 C10 3/8 SS5Y7-52 (Top ported) 164n + 510 0.18 3.8 0.21 3.5 C10 3/8 Calculation of effective area S and sonic conductance C: S = 5.0 x C Note 1) The value is for manifold base with 5 stations and individually operated 2-position type.

2

drain: ADM200-041, plug housing assembly: 173090-2, receptacle: 173707-1, rubber plug: 172888-2 IDF-S0087 Single-phase 100 VAC (50 Hz) 100/110 VAC (60 Hz) 348 166 474 133 238 378 Single-phase 200 VAC (50 Hz) Three-phase 200/220 VAC (60 Hz) Assembly of motor type auto drain: ADM200-042, plug housing assembly: 173090-2, receptacle: 173707-1, rubber plug: 172888-2 288 496 IDF-S0090 494 149 146 510

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /m40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510

Electric Actuator/Slider Type

Model L A B n D E LEFS25 S -100 260.5 106 210 4 LEFS25 S -200 360.5 206 310 6 2 240 LEFS25 S -300 460.5 306 410 8 3 360 LEFS25 S -400 560.5 406 510 8 3 360 LEFS25 S -500 660.5 506 610 10 4 480 LEFS25 S -600 760.5 606 710 12 5 600 25 Electric Actuator/Slider Type Motor Parallel Type Series LEFS Dimensions: Ball Screw Drive Motor right side parallel type: LEFS32R With lock: LEFS32 S B 5H9

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E 300 552 306 467 6 2 340 400 652 406 567 8 3 510 500 752 506 667 8 3 510 600 852 606 767 10 4 680 700 952 706 867 10 4 680 800 1052 806 967 12 5 850 900 1152 906 1067 14 6 1020 1000 1252 1006 1167 14 6 1020 1100 1352 1106 1267 16 7 1190 1200 1452 1206 1367 16 7 1190 1300 1552 1306 1467 18 8 1360 1400 1652 1406 1567 20 9 1530 1500

Thermo-con/Rack Mount Type

approx. 90% (UL Standards) Exhaust heat 2500 W The water-cooled type has been added. (800 W, 1.2 kW) Exhaust heat 250 W RoHS Reduces the amount of exhaust heat by 90% Suppresses rises in the ambient temperature 1.2 kW type Water-cooled 1 kW type Air-cooled Space-saving design with reduced height 267 mm 221 mm 176 mm HECR012-W2 HRCR010-A2 Air-cooled Air-cooled Water-cooled 200 W, 400 W, 510

Slider Type Ball Screw Drive/11-LEFS Series

Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF

Profile Design ISO/VDMA Air Cylinder Series CP95

560 460 600 440 550 640 0.8 510 430 550 400 510 580 0.9 470 400 510 380 470 550 1 430 370 480 350 440 510 G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-28 ISO/VDMA Air Cylinders Series CP95 Maximum stroke determination Allowable theoretical strokes (mm) Mounting type Accessories Pressure Bore (mm) [MPa] 32 40 50 63 80 100 L F (front) G (rear) L 0.2

Stability of suction position,

Lifting force = Theoretical lifting force t ZP ZPT ZPR [N] Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1) Pad diameter [mm] 32 40 50 63 80 100 125 S: Pad area [cm2] 8.04 12.56 19.63 31.16 50.24 78.50 122.66 XT661 85 68.3 107 167 265 427 667 1043 80 64.3 100 157 249 402 628 981 75 60.3 94.2 147 234 377 589 920 70 56.3 87.9 137 218 352 550 859 65 52.2 81.6 128 203 327 510

42

D U D U Nil Rc F G N NPT T NPTF 510 Base Mounted Plug-in Unit VQ5000 Series 1 2 3 Stations D side U side SV SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 Cable length VQC 1/2 The drawing shows the electrical entry on the D side. Cable length is measured from the valve body.

Refrigerated Air Dryer

50F(10C) IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E NPT3/8 10(17) 11(19) 12(20) ZFC NPT1/2 15(25) 16(27) 17(28) 25(43) 26(45) 28(47) SF 100F (37.8C) 100psi (0.7MPa) NPT3/4 41(70) 43(74) 45(77) 59(100) 62(106) 65(110) SFD 71(120) 80(136) 86(147) NPT1 107(182) 120(205) 130(221) LLB NPT1 1/2 161(273) 173(294) 181(308) 226(384) 258(438) 297(504) NPT2 AD 300(510

SQ1000/2000

8 One-touch fitting 10 One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting Lead wire length Dimension L (mm) Dimension L (mm) Dimension L (mm) Dimension L (mm) Station 8 9 10 11 12 13 Station 20 21 22 23 24 Station 2 3 4 5 6 7 Station 14 15 16 17 18 19 Note) Available in units of 10 pieces. 550 570 590 610 630 310 330 350 370 390 410 190 210 230 250 270 290 430 450 470 490 510

2/3 Port Valve

650 510 650 400 540 400 540 400 540 510 650 510 650 590 730 1.7 1.5 2.0 1.5 1.2 1.2 1.0 5.0 2.5 3.0 3.0 3.0 1.7 2.0 0.4 0.2 0.45 0.2 0.2 0.15 0.45 4.5 0.61 11 0.6 0.35 0.75 0.35 0.35 0.3 0.75 1/4 (6A) 0.85 0.9 1.0 0.9 0.55 0.85 1.0 0.35 0.15 0.4 0.15 0.2 0.1 0.4 6 1.05 19 0.55 0.3 0.5 0.35 0.35 0.3 0.5 Water oil air 1.0 Steam 0.5 0.13 0.08 0.15 0.08 0.1 0.08 0.15 8 1.7 31 0.17 0.2 0.2 0.2

Battery-less

Make sure workpieces mounted on the table do not interfere with other workpieces or the facilities around the table. 3 Position after returning to origin 4 [ ] for when the direction of return to origin has changed [mm] Model H LEFB25ETST 115.8 LEFB25ETST B 158.8 Dimensions Model L A B n D E LEFB25ET-300m 541.8 306 467 6 2 340 LEFB25ET-500m 741.8 506 667 8 3 510 LEFB25ET-600m 841.8 606