CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

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A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

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P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

NCA1

+ Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MM KK E A AA B BA C D EA EE F W FB G J R TF UF WF Y P ZB LF Bore size (in) 150

NCA1

Note) Lead wire length symbols: 0.5 m Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-7 7 Series NCA1 Basic Style: NCA1B (MX0 mounting style) ZB + Stroke P + Stroke D across flats 4-DD 2-EE (NPTF) AA KK EA MM BA B A C R WF G J E LF + Stroke Bore size (in) MM KK A AA B BA C D DD E EA EE G J R WF Y LF P ZB 150 (1.5") 5/8 7/16-20 3/

NCA1

Note 2) Refer to p.5.3-5 for lead wire length.

Air Slide Table

(The part number has a P suffix.) Metal Stopper Table Extension stroke end Retraction stroke end C D M B B E M P A C F Metal stopper only M G A D A MXQA-A38 Model Adjuster part no.

Table of Contents

Section Za detail (3/1) Adjustable range 12 Zb JJ 6 5 3.5 K Zb M4 x 0.7 H 1 1 A L 2 x 2-LD 8.5 28.5 Section Zb detail (Adjustable range) Section Zb detail (3/1) Adjustable range (mm) 2 x 2-6.5 A 45 55 B 45 52 C D 30 35 F 52 59 G 38 50 H 18 21 Model MY-J16 MY-J20 Applicable bore size MY1B16 MY1B20 22.5 26 JJ M4 x 0.7 M4 x 0.7 K 10 10 LD 6 6 L 4 4 E4 1 1 P 7 7 Q 3.5 3.5 E3 1 1 Model MY-J16

MY1

Applicable bore size Applicable bore size 16, 20 10 Application example Application example Work piece W SMC Floating bracket Guide Series MY1B Mounting example Mounting example G D Za 30 20 Za 1 E E E E C 1 20.5 F B 41 53 Section Za detail (adjustable range) Section Za detail (3/1) Adjustable range Q P Zb JJ 12 6 3.5 5 K H Zb M4 x 0.7 1 1 A L 2 x 2LD 8.5 Section Zb detail (adjustable range

MY1

Section Za detail (3/1) Adjustable range 12 Zb JJ 6 5 3.5 K Zb M4 x 0.7 H 1 1 A L 2 x 2-LD 8.5 28.5 Section Zb detail (Adjustable range) Section Zb detail (3/1) Adjustable range (mm) 2 x 2-6.5 A 45 55 B 45 52 C D 30 35 F 52 59 G 38 50 H 18 21 Model MY-J16 MY-J20 Applicable bore size MY1B16 MY1B20 22.5 26 JJ M4 x 0.7 M4 x 0.7 K 10 10 LD 6 6 L 4 4 E4 1 1 P 7 7 Q 3.5 3.5 E3 1 1 Model MY-J16

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

LB ZB LB 075 (3/4") 4.00 3.00 4.00 3.00 NCA 088 (7/8") 3.91 2.91 3.66 2.66 106 (1 1/16") 4.13 2.88 4.00 2.75 D125 (1 1/4") 5.56 3.56 5.31 3.81 150 (1 1/2") 5.25 3.51 3.38 5.12 -X 200 (2") 4.44 6.82 6.56 4.18 Note) Length not affected by addition of magnet except 106 bore. 20Double Acting Double Rod with Magnet (106 bore) (in) Data Bore No bumper Bumper LB ZB LB ZB 106 (1 1/16") 3.13 4.38

Compact and Lightweight

ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 547 VQ1000/2000 1021S kit (Serial transmission) EX120/123/124 P. 551 VQ2000 1021M kit (Circular connector) P. 557 VQ2000 Sub-plate Single Unit VQ1000/2000 Semi-standard VQ1000/2000 Construction VQ1000/2000 Exploded View of Manifold VQ1000/2000 Manifold Optional Parts VQ1000/2000 Specific Product Precautions P. 560 P. 561 P. 564 P. 567 P. 571 P. 575 102110211021102110211021514 1021Series

Electric Actuator Triple Axis P&P Unit

P Unit How to Order Single Axis LG 240Z 50 Y G J Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol H A C J Y axis motor in-line mount Z axis motor in-line mount Z axis motor side mount Y ZB ZC 1 2 Stroke(mm) 1) Used for X axis in double and triple axis P&P. 2) Used for Y axis in double and triple axis P&P. 100

The IZF10R shares the same fan size and ±13V ion balance with the IZF10, with two new features. A new 4-speed fan adjuster knob is added, including one higher and one lower speed for faster neutralization and greater range, or quieter operation. In addition to the high current/high voltage switch output, a second output signal indicates when emitter maintenance is required.

The IZF10R shares the same fan size and ±13V ion balance with the IZF10, with two new features. A new 4-speed fan adjuster knob is added, including one higher and one lower speed for faster neutralization and greater range, or quieter operation. In addition to the high current/high voltage switch output, a second output signal indicates when emitter maintenance is required.

[Features] · Air flow adjustment function added (IZF10R). · High-speed ionization. · Allows you to detect emitter contamination. · Compact fan type with simple functions. · Alarm function for reporting high voltage issues or maintenance warnings.

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3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2