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0.5

M1 IZS30 A0201 IZS30 (10 replacement felt pads) (With 1 felt pad, 1 rubber grindstone, and 2 replacement felt pads) A0202 IZS30 (1 replacement rubber grindstone) Felt Rubber grindstone 12 IZF21/31 Series Specifications Model IZF21-m IZF21-P IZF31-m IZF31-P NPN PNP NPN PNP Maximum air flow 1.8 m3/min 4.4 m3/min Applied voltage 5 kV Ion generation method Corona discharge type Method of applying

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5351 (A) 4 (B) 2 VQ5350 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5451 VQ5450 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5551 (A) 4 (B) 2 VQ5550 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3 Description Material Note No. 1 2 3 Body

VQ4000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double

VQ5000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1)

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Table of Contents

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Assembly part no.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Assembly part no.

ITV_D-E

O R LESS O PERATE TEM PERATU RE 050 EN CLO SU RE EQ U I VALEN T TI I P65 APPRO X. 300g ( N O ACCESSO RI ES) I TV1000 APPRO X. 400g ( N O ACCESSO RI ES) I TV2000 M ASS APPRO X. 670g ( N O ACCESSO RI ES) I TV3000 N ot e. 1) U p t o 0. 2M Pa f or t he speci f i cat i on of 0. 1M Pa out put pressure. 4 W i ri ng m et hod CAU TI O N Proceed caref ul l y, as i ncorrect w i ri ng can cause dam

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

SU) S 2 YA View With internal shock absorber MSQAR MSQBR High precision type MSQAA 11221122DA M5 x 0.8 depth (Vacuum suction port) 1122DB DC (HD) HB HA HE (Max.

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

NCA1

+ Stroke E NCM LF + Stroke WF C R 4-DD J G 2-EE (NPTF) NCA SB Screw D(4) Hole EA MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF XS Y ZB 150 (1.5) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 3.63 2.36 1.43 3/8 2.88 5/8 0.94 3/8 0.94 2.75 3.50 1 1.38 1.71 5.19 200 (2) 5/8

NCA1

+ Stroke E NCM LF + Stroke WF C R 4-DD J G 2-EE (NPTF) NCA SB Screw D(4) Hole EA MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF XS Y ZB 150 (1.5) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 3.63 2.36 1.43 3/8 2.88 5/8 0.94 3/8 0.94 2.75 3.50 1 1.38 1.71 5.19 200 (2) 5/8