Table of Contents

-R4 3 8 Rc 1 4 Rc 1 8 13.6 17.6 25.2 27.0 14 17 19 24 28.0 33.5 38.5 39.0 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 17.8 28.5 33.8 57.1 T Rc Rc 1 2 VMG 15-2-115 8 Series KB 3 Other Piping Material Nipple: KBN Weight (g) D L A Model KBN1 KBN2 KBN3 KBN4 2.9 4.6 7.2 10.2 16.8 21.0 28.6 30.4 14.0 15.0 16.5 17.0 35.0 39.0 41.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

Fluoropolymer Piping Equipment

LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1E41-R2 4 4-12 LQ1-4N12 LQ1-4B12 3-08 LQ1-3N08 LQ1-3B08 LQ1E41-R3 4 4-12 LQ1-4N12 LQ1-4B12 2-06 LQ1-2N06 LQ1-2B06 LQ1E41-R4 4 4-12 LQ1-4N12 LQ1-4B12 2-04 LQ1-2N04 LQ1-2B04 LQ1E51-R2 5 6-19 LQ1-6N19 LQ1-6B19 4-10 LQ1-4N10 LQ1-4B10 LQ1E51-R3 5 6-19 LQ1-6N19 LQ1-6B19 3-08 LQ1-3N08 LQ1-3B08 LQ1E51-R4 5 6-19 LQ1-6N19 LQ1-6B19 2-06 LQ1-2N06 LQ1-2B06 LQ1E51

AC Servo Motor Driver (Pulse input type/Positioning type ）

Doc no. LEC*-OMY0114-A PRODUCT NAME AC Servo Motor Driver (Pulse input type/Positioning type MODEL/ Series LECSB2-T Series This product can be used by adding a dedicated file (pushing operation extension file) to the setup software (MR Configurator2TM: LEC-MRC2E). Please download the dedicated file from SMC website. LECSB2-T Series / Driver 1. Safety Instructions These safety instructions

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

VQZ1000/2000/3000

59> 300 Cross section 0.23 mm2 Cover diameter 1.5 Indicator light 119 300 131 55 (Lead wire length) 61 Indicator light 47.5 <52.5> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23 mm2 < >: AC < >: AC 2-7-41 Base Mounted 42 42 Series VQZ1000/2000/3000 Dimensions: VQZ2000 2 position single Grommet (G): VQZ2150 1(R)-G-01 02 300 84.5 (Lead wire length) 24.5 mounting hole 54.5 24 9 9 R4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

75 0 1 01 02 M plug connector (M): VQZ225 (R)lMl 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 300 122.5<124.5> 61.5<62.5> 73.5 147 58.5<63.5> < >: AC 1.12-41 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 3 position closed center/exhaust center/pressure center 3 4 5 0 1 01 02 Grommet(G): VQZ2 5 (R)lGl 300 122 24.5Mounting holes (Lead wire length) 54.5 9 9 R4

Low torque Metal seal type Rotary joint

R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5 Cross section 0.23mm2 45(46) : AC : AC 2.10-28 VQZ100/200/300 Base Mounted Dimensions: VQZ200 Valve single unit Grommet (G): VQZ2l5(R)-lGl01 02 2-4.5 Mounting holes 4 32 19.2 Manual override Cover dia 1.6 Cross section 0.34mm2 R4

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

10

U side 7 6 5 4 3 2 D side Stations 1 Cable 6 to 12 G1/2 G1/2 (44) R3 R4 T E D R1, R6 R5 R2 F F n x 1/8,1/4 OUT port (For common SUP type) IN port (For individual SUP type) (mm) n (stations) Size Dimensions 2 3 4 5 6 7 8 9 10 86 100 90 108 103 121 L1 L2 L1 L2 L1 L2 122 136 126 144 144 162 158 172 162 180 185 203 194 208 198 216 226 244 230 244 234 252 267 285 266 280 270

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11 LQ3T5A-R12 LQ3T6A-R1 LQ3T6A-R2 LQ3T6A-R3 LQ3T6A-R4 LQ3T6A-R5 LQ3T6A-R6 LQ3T6A-R7 LQ3T6A-R9 LQ3T6A-R10 LQ3T6A-R12 LQ3T6A-R13 LQ3T6A-R14 Applicable tubing O.D. 1

MLGC

Note) $1, %4 will not be required for the one without rear plate. 9-4-6 7 Fine Lock Cylinder with Guide Series MLGC Dimensions Basic style: With rear plate MLGCB--R4-F through Counterbore G Back side 4-H 2-O through Rear plate P Head side cylinder port BP Unlocking port Unlocked when pressurized CL CL1 P Rod side cylinder port MLGC W U A' CNG MNB BP Lock port for pressure lock (Plug with

V100

Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ25(R)-G01 02 2-4.5 mounting hole 19.2 4 32 Manual override Cover dia. 1.6 Cross section 0.34 mm2 R4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ25(R)-G01 02 2-4.5 mounting hole 19.2 4 32 Manual override Cover dia. 1.6 Cross section 0.34 mm2 R4

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: M (Fixed SI Unit), Stations: 4, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R4 (w/Control Unit, Supply Port: Right Side, With regulator, Square type pressure gauge; 0.2 MPa)