CATALOG

31.5 30.5 73.5 13 17 21 1/4 7 44 KM11-07-11-10 25 1/2 6 85 12.8 24 37.7 35.9 15.2 52.8 15 18.5 22 5/16 9.5 44 KM11-09-13-6 25 1/2 10 115 12.8 24 37.7 35.9 15.2 83 15 18.5 22 5/16 9.5 62 KM11-09-13-10 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

F

31.5 30.5 73.5 13 17 21 1/4 7 44 KM11-07-11-10 25 1/2 6 85 12.8 24 37.7 35.9 15.2 52.8 15 18.5 22 5/16 9.5 44 KM11-09-13-6 25 1/2 10 115 12.8 24 37.7 35.9 15.2 83 15 18.5 22 5/16 9.5 62 KM11-09-13-10 MORE DIMENSIONS S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

KJ

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 40 22 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 61.5 30 48 32 10 19.5 31.5 21.5 30.5 13.2 13 17 21 7 1 4 3 8 73.5 44 52.8 44 12.7 23.7 37.7 25 35.9 15.2 15 18.5 22 9.5 5 16 1 2 83 62 Metric Applicable

Vacuum System Peripherals:

/Vacuum pump system) SY/SYJ/VZ/VQZ/VK/VX2-3 13-14-6 VT/VP/VS/VG/VEX3 13-14-8 ZCU Vacuum Pressure Switch AMJ 1.

KJ

76 KM11-06-10-10 10 102 10 31.5 21.5 31 17 19.5 13 13.5 21 6 10 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 35.5 24 34.5 18.5 22.5 15.5 14.7 22 8 12 9 Dimensions: KM12 2-4.5 mounting hole N-F Applicable tubing O.D.

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

2

41 13.3 13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6 7 3.2 Color Cap: KQ2C Applicable tubing Applicable tubing O.D.

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

1

5.5 12 21 25 39 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 6 13 20.5 32.5 44.5 16 6.5 12.5 21 33 45 51 75 93 105 6 5.5 12 12 21 25 39 D-M9lV 10 6 13 13 20.5 32.5 44.5 16 6.5 12.5 12.5 21 33 45 51 75 93 105 6 1.5 8 17 21 35 Band mounting D-A9l 10 2 9 16.5 28.5 40.5 16 2.5 8.5 17 29 41 47 71 89 101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5

Speed Controller with Indicator

(13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (S) 6 10.4 14 (13) AS221FS-01-08 (S) 8 13.2 22.4 29.5 14.2 15 (14) AS221FS-01-10 (S) 10 15.9 25.3 32.4 15.6 16 (15) AS221FS-02-23 (S) 3.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 23 (24) AS221FS-02-04 (S) 4 8.2 AS221FS-02-06 (S) 6 10.4 23.4 32.7 (32.8

Vacuum Unit

C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 35 Vacuum (V) port 1 Refer to page 38 for dimensions with a mounting bracket.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

PORT SOL.a 5.5 17 17 16 15 14 13 12 11 10 8 7 6 5 4 3 2 1 COM 8 7 6 5 4 3 2 1 COM 35 SOL.b SOL.b 16 15 14 13 12 11 10 9 114.3 3 4 5 6 7 8 9 stations Stations n L1 L2 L3 L4 2 stations 173 162.5 144 14.5 A A A 285.5 275 256 14.5 273 262.5 240 16.5 248 237.5 224 12 235.5 225 208 13.5 223 212.5 192 15.5 210.5 200 176 17 185.5 175 160 12.5 DIN rail 9 11 12 13 14 15 16 17 stations Stations n L1

Speed Controller with One-touch Fitting

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

reduces flow setting time

(13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (S) 6 10.4 14 (13) AS221FS-01-08 (S) 8 13.2 22.4 29.5 14.2 15 (14) AS221FS-01-10 (S) 10 15.9 25.3 32.4 15.6 16 (15) AS221FS-02-23 (S) 3.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 23 (24) AS221FS-02-04 (S) 4 8.2 AS221FS-02-06 (S) 6 10.4 23.4 32.7 (32.8

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

(13) AS221FSG-01-04 (S) 4 8.2 AS221FSG-01-06 (S) 6 10.4 14 (13) AS221FSG-01-08 (S) 8 13.2 22.4 29.5 14.2 15 (14) AS221FSG-01-10 (S) 10 15.9 25.3 32.4 15.6 16 (15) AS221FSG-02-23 (S) 3.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 23 (24) AS221FSG-02-04 (S) 4 8.2 AS221FSG-02-06 (S) 6 10.4 23.4

LEC-OM02704CN

G3-G4 120V AC/DC 0.5A/4.8VDC 2.4VA 13 11 13 (4) (a) LEC-MR-RB-032LEC-MR-RB-12 [mm] TE1 G3 6 6 LA G4 LB (12) P (6) C 0.5~0.6[N m] M8 MR-RB 144 12 6 156 168 M5 5 3.24[N m] G3 G4 P C TE1 1.6 6 [kg] LA LB LC LD (20) LD LC LEC-MR-RB-032 30 15 119 99 0.5 LEC-MR-RB-12 40 15 169 149 1.1 13 12 13 13.3 LEC-MR-J3BAT (IATA)(44)200311 (Class9)24 24903 (20083) (1) LEC-MR-J3BAT 5.7 (2) LEC-MR-J3BAT

SX

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Metric size Inch size 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 3.2 4 6 8 10 12 With One-touch fittings Stainless steel specifications (Stainless steel 303) Use 1/8" tube. Made to Order Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 Ex.) AS1001FG-04-X12 Ex.)