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Support Guide/11-LEFG Series

35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600 11-LEFG25-S-600 730 607 710 11-LEFG25-S-150 280 157 260 11-LEFG25-S-200 330 207 310 6 2 240 11-LEFG25-S-250 380 257 360 11-LEFG25-S-300 430 307 410 8 3 360 11-LEFG25-S-350 480 357 460 11-LEFG25-S-400 530 407 510 35 528 Support Guide 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG32-S 42 70 (122) 5H9 (+0.030 0 ) depth

1

Nil S R V RV VP B BS BR Side Top Bottom A-e aTension bolt ( ) For silencer (supply side). E port is plugged. Note) B for bottom ported can be selected for the SY5000/7000 series. Tightening torque: 0.8 Nm SY3000: 2 pcs. SY5000/7000: 3 pcs.

Table of Contents

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Electric Actuators

1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

Table of Contents

1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

Compact Electric Actuator Series LG1

-F Stroke 100 200 300 400 500 600 700 800 900 1000 1200 Note) Note) Dimensions inside ( ) are for a 100mm stroke. 6 Series LG1H High Rigidity Direct Acting Guide Type LG1H21: With Coupling/Construction 1 4 6bn 3 2 bn 5 bs A A' 9 bq br bt bk bm bo 8 bl bp View A-A' 7 Material Note Parts list Material Note Parts list No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

BS Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

SV

+ BS 24 V 0 V BDH BDL BS + BS 24 V 0 V BDH BDL CANH V + 24 V 0 V V CANL CANH FG V + Slave unit 75 Slave unit 03 Slave unit 01 Master unit S2 S1 S2 S1 S2 S1 S2 S1 V BDH Master Connector with terminal resistor SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Type 3 ground Type 3 ground Type 3 ground Type 3 ground CANH V + Connect the shielding wire to the SD terminal.

Series SV

+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

CY1

Nil B BS With shock absorber (1pc. on port side) The adjustment bolt is installed even when B or BS is selected. (except for 10) Refer to "Auto Switch Guide" (E274-A) for further details on auto switch units. Refer to pages 60 and 61 for auto switch circuit diagrams. Applicable auto switch types Lead wire length (m) Note 1) Load voltage Electrical entry direction Auto switch no.

Direct Solenoid

May bs hld enrgiz6d indetlnliely wlthoul damage. However, care muet bs laken to arange your controls so that you nevr energlz both solenolds simultanously. lf bolh solenoids are enrglzd, solenold wlll burn out. Heavy duty alr valves bullt to comply with JIC and all industrial slandards.

2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

High Vacuum Angle Valve, XL Series

200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400

XL

200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400

Secondary Batteries

Stroke adjusting unit Cylinder stroke (mm) Nil L H LH Without adjusting unit With low load shock absorber + Adjusting bolt With high load shock absorber + Adjusting bolt With one L unit and one H unit each 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 20, 25, 32, 40 50, 63 No stroke adjustment units are used for 50 and 63.

MXQ

D+1 0 mm Stroke length tolerance -X 20Option Data Extension end (AS) Stroke adjustment Rubber stopper Retraction end (AT) range 0 to 5 mm Both ends (A) Extension end (BS) W/ shock absorber is not available in Series MXQ6.

CATALOG

1200 1000 1000 6 12 14 20 22 Starting Torque Nm x 10-3 An ambient atmosphere that causes rust is non permissible.

A

, 1400, 1600, 1800, 2000 32 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 O P T I O N S T R O K E A D J U S T M E N T U N I T Stroke Adjustment Unit 25 MY-A25L 32 MY-A32L 40 MY-A40L 25 MY-S25L MY-S25B 32 MY-S32L MY-S25B 40 MY-S40L MY-S32B M O R E H O W T O O R D E R S E E N