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Battery-less

to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 750 20 to 550 10 to 300 801 to 900 24 to 610 16 to 410 8 to 200 30 to 750 20 to 550 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to

2

Nil H L S 10 15 25 50 100 200 600 750 1000 40 Select from Series IDGA (page 79) 60 Port size/Applicable tubing O.D.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Shock Absorbers and Rate Controls

500 12.5 20.0 ;00 l7 LR0Eltttl.l5rl ,63 1.00 3-80 1,700 670,000 2,500 12.5 20_0 /50 l 7 0tl{l l.l5x2 .63 2.00 t 2,130 3,400 875,000 2.500 7.0 20.0 500 25 LR0tl{ll.l5x2 .63 2.00 3-80 3,400 875,000 2,500 7.0 20.0 750 1.5 0tlll1.25x I .0J t.00 t2-r30 1,i00 808,000 2,500 12. 20.0 i00 20 LROtlill,25xl .63 1.00 3-80 1,700 808,000 2,500 12.5 20.0 750 20 0tlf,1,25x2 .63 2.00 l2-130 3,400 986,000

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01

Series: LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 350mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R5 (5m)

Series: LEFS, Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: Battery-less absolute, 24VDC, Step, Lead: Size 25: 20mm, Size 32: 24mm, Size 40: 30mm, Stroke: 350mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: 5m, Controller: -, Mounting: -, I/O Cable:

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 750mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 750mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable), Actuator Cable

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Right Side Parallel, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 750mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator

CA2

20 to 750 40 37 102 32 78 25 52 18 76 160 21 13 M12 x 1.75 10 119 13.5 130 102 MB1 up to 750 20 to 750 40 37 116 41 92 30 52 18 92 180 21 16 M12 x 1.75 10 133 13.5 150 116 CA2 If a hole is provided to accommodate the boot when the air cylinder is mounted, make the hole diameter larger than the outside diameter of the boot d.

CL

(mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 125 140 160 AL LH KA BX K B1 EA B BY BP C D GB GC H1 J LD FA F EB GA With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to1400 30 to 1400 30 to 1400 Without rod boot to 500 to 600 to 600 to 750 to 750 to 1400 to 1400 to 1400 1 4 1 4 1 4 1 4 1 4 1 2 1 2 3 4 / / / / / / / / 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10

CATALOG

20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 With Gaiter Without Gaiter Bore (mm) ZZ ZZ H f h e l 146 154 40 51 15 59 65 167 50 15 66 58 75 159 178 15 66 75 63 1/4 Stroke 170 58 213 204 15 80 71 80 80 215 224 100 72 15 81 90 D I M E N S I O N S R E A R M A L E C L E

A

20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 With Gaiter Without Gaiter Bore (mm) ZZ ZZ H f h e l 146 154 40 51 15 59 65 167 50 15 66 58 75 159 178 15 66 75 63 1/4 Stroke 170 58 213 204 15 80 71 80 80 215 224 100 72 15 81 90 D I M E N S I O N S R E A R M A L E C L E

1

Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2-Z Series CM2-Z P .352 P .356 P .474 Air Cylinder Air Cylinder Air Cylinder Series CG1-Z Series MB-Z Series CA2-Z P .592 P .686 P .750

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

CNA

Up to 750 9 56.5 M8 x 1.25 11.5 67 M10 x 1.25 13.5 83 M12 x 1.75 13.5 98 M12 x 1.75 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Stroke range (mm) e Bore size (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 215 43 11.2 59 1/4 stroke 223 50 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50