Series: LEG, Body Size: 25, Bearing Type: M (Sliding), Motor Mounting: Top Side Parallel, Motor Type: G (High performance Battery-less Absolute, Step Motor 24VDC), Lead: B (25: 6mm; 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover)

Series: LEY, Size: 25, Motor Mounting Position: D (In-line), Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: R3 (3m), Controller: C9H

Series: LEY, Size: 16, Motor Mounting Position: Top Side Parallel, Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 40: 16mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: R3 (3m), Controller

Series: LEY, Size: 25, Motor Mounting Position: In-line, Motor Type: High Performance Battery-less Absolute, Step Motor, 24 VDC, Lead: Size 16: 5mm, Size 25: 6mm, Size 40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: 3m, Controller: EhterNet/IPâ„¢, Controller

Series: LEY, Size: 16, Motor Mounting Position: Top Side Parallel, Motor Type: High Performance Battery-less Absolute, Step Motor, 24 VDC, Lead: Size 16: 10mm, Size 25: 12mm, Size 40: 16mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: 3m, Controller: EhterNet/IPâ

Series: LEG, Body Size: 40, Bearing Type: M (Sliding), Motor Mounting: Top Side Parallel, Motor Type: G (High performance Battery-less Absolute, Step Motor 24VDC), Lead: B (25: 6mm; 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R3 (Robotic Cable 3m), Controller: C9H (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting)

2

Bending value (Reference) 20 Complies with FDA (Food and Drug Administration) 177-1550 Operating temperature Air, Inert gas: 20 to 200C, Water: 0 to 100C (No freezing) dissolution test.

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

Series: LEG, Body Size: 25, Bearing Type: M (Sliding), Motor Mounting: Top Side Parallel, Motor Type: G (High performance Battery-less Absolute, Step Motor 24VDC), Lead: B (25: 6mm; 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R8 (Robotic Cable 8m)

Series: LEG, Body Size: 25, Bearing Type: Sliding, Motor Mounting: Top Side Parallel, Motor Type: High performance Battery-less Absolute, Step Motor 24VDC, Lead: 25: 6mm; 32/40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Actuator Cable Type, Length: Robotic Cable 15m, Controller: -, Mounting: -, I/O Cable Length: -

Series: LEG, Body Size: 25, Bearing Type: Sliding, Motor Mounting: Top Side Parallel, Motor Type: High performance Battery-less Absolute, Step Motor 24VDC, Lead: 25: 6mm; 32/40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Actuator Cable Type, Length: Robotic Cable 8m, Controller: EtherNet/IPâ„¢, Mounting: DIN Rail, I/O Cable Length: -

Series: LEG, Body Size: 25, Bearing Type: Sliding, Motor Mounting: Top Side Parallel, Motor Type: High performance Battery-less Absolute, Step Motor 24VDC, Lead: 25: 6mm; 32/40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Actuator Cable Type, Length: Robotic Cable 5m, Controller: EtherNet/IPâ„¢, Mounting: DIN Rail, I/O Cable Length: -

Series: LEG, Body Size: 25, Bearing Type: M (Sliding), Motor Mounting: Top Side Parallel, Motor Type: G (High performance Battery-less Absolute, Step Motor 24VDC), Lead: B (25: 6mm; 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: RB (Robotic Cable 15m)

Series: LEG, Body Size: 25, Bearing Type: M (Sliding), Motor Mounting: Top Side Parallel, Motor Type: G (High performance Battery-less Absolute, Step Motor 24VDC), Lead: B (25: 6mm; 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R8 (Robotic Cable 8m), Controller: C9H (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail)

Series: LEG, Body Size: 25, Bearing Type: M (Sliding), Motor Mounting: Top Side Parallel, Motor Type: G (High performance Battery-less Absolute, Step Motor 24VDC), Lead: B (25: 6mm; 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R5 (Robotic Cable 5m), Controller: C9H (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail)

Series: LEG, Body Size: 25, Bearing Type: M (Sliding), Motor Mounting: Top Side Parallel, Motor Type: G (High performance Battery-less Absolute, Step Motor 24VDC), Lead: B (25: 6mm; 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Actuator Cable Type, Length: R5 (Robotic Cable 5m), Controller: CEH (EtherCAT®), Mounting: 8 (DIN Rail)

High Vacuum Angle Valve, XL Series

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Rotary Actuator

-X7 Angle adjusting screw "B" Angle adjusting screw "A" Rotation at 90 Heat resistant In this rotary actuator, the material of the seals has been changed to the heat resistant type (to withstand up to 100C), for applications in environments that exceed the standard specification temperatures of 0 to 60C.