Made to Order

to 29 6 to 29 6 to 49 6 to 49 6 to 99 6 to 99 11 to 99 11 to 99 (mm) ( ): Denotes the dimensions of auto switch type.

High Vacuum Angle Valve

2-1 3 4 5 6 O-ring Part No.

Aluminum High Vacuum Angle Valve

2-1 3 4 5 6 O-ring Part No.

1

spring pin 6-17-87 2 -XC30 Rod side trunnion 6-17-88 3 -XC34 Rod does not extend beyond non-rotating plate 6-17-90 4 -XC35 With coil scraper 6-17-91 5 -XC36 With boss in rod side 6-17-95 6 -XC37 Larger throttle diameter of connecting port 6-17-95 7 -XC38 Vacuum (Rod through-hole) 6-17-96 8 -XC42 Built-in shock absorber in head cover side 6-17-97 9 -XC51 With hose nipple 6-17-98 0 -

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

SV

Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

Table of Contents

(3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2-4-84 Built-in silencer Built-in silencer 2-4-5 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4-6 7 Cylinder Speed Chart Use as a guide for

Table of Contents

SUP port: 6 VAC port: 6 AMJ Misc.

PC Wiring System Series PCW

JAPAN 42 4 5 6 7 1 + *S2 S1 2 3 4 4 4 (28.5) 3 80 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 + 28.3 CS0 CS1 YMX-F4 0 1 2 3 DC24V MADE IN JAPAN 45 4.1 4 5 6 7 1 + *S2 S1 2 3 4 5.1 (48.5) 83 10.5 10.5 (50) Branch output unit can be used for mixed connection PCW series.

ZX

VJ10-20-4A-6 2 pcs. 5A 10 ZS ZP (For DC) 4A 20 VJ10 6 Lead wire length ZCU Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 AMJ (For 110 VAC) Note) If ordering switch with 5 m lead wire, specify both switch and lead wire with connector part numbers. Ordering example) ZX100-K150Z-ECN1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. 3A 36 VJ10 6 Misc.

2

AD17-6-A AD27-6-A With bowl guard AD27-6C-A AD37-6-A AD47-6-A Normally open (N.O.)

Electric Actuator/Slider Type

0 #3 @3 @6 @7 @9 @4 #8 o t @0 @2 !6 !5 w r e #7!3!4 !7 #1 !8 #0 @5 @1 @8 !9 #6 #5 #2 Motor details Component Parts No. Description Material Note No.

Series VQ Base Mounted Metal Seal/Rubber Seal

Elbow One-touch fitting 4 for bottom piping Elbow One-touch fitting 6 for bottom piping Elbow M5 thread for bottom piping Mixed size for elbow piping Kit/Electrical entry/Cable length F Kit (D-sub connector) P Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) U0 U1 U2 U3 Connector location Top (vertical) Side (horizontal) P.1.10-170 P.1.10-174 S0 S1 S2 S3 S0 S1

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Environment

LEY -X5 S7 AC servo motor (Absolute encoder) 200 63 LECSB-S7 LECSC-S7 LECSS-S7 u Cable type*5, *6, *7 11LEFS Nil Without cable S Standard cable R Robotic cable (Flexible cable) *1 For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. *2 For details about the driver, refer to page 607. 11LEJS *6 The motor and encoder cables are included.

3 Port Solenoid Valve/

M12 connector with 6 pins is available. w Long service life: B10d: 10 million times e The return spring releases the residual pressure securely regardless of pressure level.

Title not found

Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

SX

124 to 1-6-138.)

Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material