Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

Electric Actuator/Slider Type

mm] 600 600 600 600 Me X 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25

2

Wall Note) For air-cooled type, leave a space of at least 600 mm between the heat exhausting surface and the wall. For water-cooled type, leave a space at least 600 mm between the facility water piping side and the wall. Leave at least 600 mm on the sides indicated with .

Slider Type Ball Screw Drive/11-LEFS Series

300 400 500 600 700 800 900 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] Servo Motor (24 VDC) The following graph shows the values when moving force is 250%.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180

Environment

20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Refer to Minimum Stroke for Auto Switch Mounting on page 54.

C95

63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

CP95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

CP95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

V100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

CATALOG

20~600 32 35 70 52 20 40 10 17 17 M8x1.25 18 M18x.5 30 3/8 90 0 63 ~600 20~600 3 35 85 64 20 40 10 17 17 M10x1.25 18 M18x1.5 31 3/8 98 0 Bore size No gaiter With gaiter (mm) H ZZ e f h l ZZ 40 51 146 43 11.2 59 1/4 stroke 154 50 58 459 52 11.2 66 1/4 stroke 167 63 58 179 52 11.2 66 1/4 stroke 178 Courtesy of Steven Engineering, Inc. !

A

20~600 32 35 70 52 20 40 10 17 17 M8x1.25 18 M18x.5 30 3/8 90 0 63 ~600 20~600 3 35 85 64 20 40 10 17 17 M10x1.25 18 M18x1.5 31 3/8 98 0 Bore size No gaiter With gaiter (mm) H ZZ e f h l ZZ 40 51 146 43 11.2 59 1/4 stroke 154 50 58 459 52 11.2 66 1/4 stroke 167 63 58 179 52 11.2 66 1/4 stroke 178 Courtesy of Steven Engineering, Inc. !

CLA

Y. 44 M14X l .5 M18X l .5 M\8X l .5 M22Xl.5 M26X1.5 , 50 -600 20-600 32 35 70 108 Y. Y. 52 63 ! -600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

3

500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

7

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 VXH VXF VX3 VXA 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T 157 VXD Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI = L (liter). b : Critical pressure ratio [] P1 : Upstream pressure [MPa

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.