2

0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR) Flow rate L/min (ANR) 183 Regulator Series AR10-A to AR40-A Pressure Characteristics (Representative values) Conditions: Inlet pressure 0.7 MPa,

Electric Actuator/Slider Type

LECSC -S5 LECSS -S5 Motor mounting position S6 Nil Without option B With lock 100 100 to to 1000 1000 Refer to the applicable stroke table.

Slider Type Ball Screw Drive/11-LEFS Series

1500 1500 1500 1000 1000 1000 1000 L7 [mm] L7 [mm] L7 [mm] L7 [mm] Y 500 500 500 500 Mey m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LECSS-S5 200 to 1500 *3 Refer to the applicable stroke table for details.

Profile Design ISO/VDMA Air Cylinder Series CP95

A Q value of approximately 620 Nl/min is obtained. 1500 2000 1500 2000 4.The 620 Nl/min.theoretical value is multiplied by 1.4 Q = 620 Nl/min. 1.4 Q = 870 Nl/min. 160 1000 1000 Maximum air consumption Q [Nl/min.]

Cylinder with Lock

CBH14 CDH9 EB EW L MR UBh14 XD 32 26 10 65 26 0.2 0.6 12 9.5 45 200 40 28 12 75 28 0.2 0.6 15 12 52 226 50 32 12 80 32 0.2 0.6 15 12 60 245 63 40 16 90 40 0.2 0.6 20 16 70 269.5 80 50 16 110 50 0.2 0.6 20 16 90 320 100 60 20 140 60 0.2 0.6 25 20 110 353.5 Pivot Bracket: Double Clevis Pivot Bracket Double clevis pivot bracket XD + Stroke Z + Stroke EM G1 CKH9 R1 B 90 l1 H6 E2 d2 l3 A CA S5

Environment

3 e r t r Motor type* Nil Basic type H High precision type Symbol Type Output [W] Actuator size Compatible driver S2 AC servo motor (Incremental encoder) 100 25 LECSA-S1 w Size e Motor mounting position S3 AC servo motor (Incremental encoder) 200 32 LECSA-S3 Nil Top mounting D In-line 25 32 S6 AC servo motor (Absolute encoder) 100 25 LECSB-S5 LECSC-S5 LECSS-S5 S7 AC servo motor (Absolute

C95

size (mm) 32 40 63 100 50 80 Action Double acting Fluid Air 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 MPa Min. operating pressure Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient and fluid temperature Not required (Non-lube) Lubrication 50 to 1000 mm/s Operating piston speed Up to 250: +1.0 0 , 251 to 1000: +1.4 0 , 1001 to 1500

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

acting Air 1.5 MPa 1.0 MPa 0.05 MPa Action Fluid Proof pressure Max. operating pressure Min. operating pressure Without auto switch: 20 to 70C (No freezing) With auto switch : 10 to 60C (No freezing) Ambient and fluid temperature Not required (Non-lube) Lubrication Operating piston speed 50 to 1000 mm/s 50 to 700 mm/s Allowable stroke tolerance Up to 250 st: , 251 to 1000 st: , 1001 to 1500

CP95

32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500

CP95

32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500

LEJ-OM004xx

LECSC-S5 LECSS-S5 40 AC servo motor (absolute encoder) S6 100 *3 (6) Vacuum port direction Left side Nil LECSB-S7 LECSC-S7 LECSS-S7 AC servo motor (absolute encoder) S7 Right side R 63 200 Both side D *1 Fo r mo tor type S 2 and S6, note that the com patible driv er part number suffix is S1, S5. *3When v acuum ov er 50L/m in( ANR), select D. *2 (4) S troke [mm] Standard Produced upon receipt

CATALOG

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

A

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

V100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

C95

Specifications Bore size 32 40 63 100 50 80 Action Double acting Fluid Air 1.5MPa Proof pressure 1.0MPa Max. operating pressure 0.05MPa Min. operating pressure Without magnet 10 to 70C (No freezing) Ambient and fluid temperature With magnet 10 to 60C (No freezing) Lubrication Not required (Non-lube) Operating piston speed 50 to 1000mm/s +1.0 0 +1.4 0 +1.8 0 to 250: , 251 to 1000: ,1001 to 1500

•

:i 23 96 32 :g~ 234 112 3a 0125 ' 40,5 . .. 23 S5 184 28.5 96 36::~ 262 112 . 84.5 4S. 22~ 32.5 60 204 241 26 50 104 40::g~ 292 122 92 0160 I 46 S bJ 8 Made of Stainless Steel (With hard chrome plated piston rod) -XC68 Applicable lor uses where rust and corrosion are expected, such as by immersing in waler.

7

DIN terminal (With surge voltage suppressor) VXD XL Lead wire length XL1 XL2 XL3 XL4 600 mm 1000 mm 1500 mm 3000 mm Conduit terminal (With surge voltage suppressor) 3A 3B 3C 3D 3E 3F 3G 3H 3V 3J 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC DIN terminal (With surge voltage suppressor) Enter symbols in the order below when ordering a combination of electrical

LEC-OM02904

DI1 DI2 DI3 Q173DCPUQ172DCPUQ173HCPUQ172HCPUQ170MCPUQD74MHQD75MH 3 8 3 3.3 3.3.1 9 L1L2L3AC200230VL1L2L3 LECSS2-S5 LECSS2-S7 LECSS2-S8 LECSS1-S5 LECSS1-S7 LECSS1-S8 L1L2L3 AC200230V50/60Hz L1L2L3 AC200230V50/60Hz L1L2 AC100120V50/60Hz L1L2 P()-D() P()-DPC PCD 14.214.5 3 9 3 () L11L21 LECSS2-S5 LECSS2-S7 LECSS2-S8 LECSS1-S5 LECSS1-S7 LECSS1-S8 L11L21 AC200~230V L11L21 AC100120V

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1500mm